1994
DOI: 10.1063/1.355362
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Omega head—an experimental 120-turn inductive head

Abstract: Experimental 120-turn thin-film inductive heads have been built. The key features of this head are the 6-μm pitch helical coils and an omega-shaped, planar yoke structure having dual easy axes. Hardbaked photoresist insulator layers are used to encapsulate the yoke and to smooth out the wafer surface topography. Micro-Kerr studies show that the easy axis remains in the transverse direction in the yokes after multiple anneals. The P1/G/P2 is 3.8/0.3/3.8 μm, and the yoke length is close to 1 mm. The helical coil… Show more

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