‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications

Devi, Anjana

doi:10.1016/j.ccr.2013.07.025

Cited by 147 publications

(125 citation statements)

References 248 publications

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“…Atomic layer deposition (ALD) is a method based on successive, alternating surface-controlled reactions from the gas phase to produce highly conformal and uniform thin film nanostructures, and provides the thickness control at the atomic level [25,26]. The structure growth principle by ALD is similar to the CVD, except the ALD reaction breaks the CVD process into two half-reactions, keeping the precursor materials separate during the reaction.…”

Section: Atomic Layer Depositionmentioning

confidence: 99%

“…Next, the second precursor is purged and reacts with the first precursor on the surface. At the end of the process, the unused second precursor and the reaction byproducts are also removed [25,26]. The precursors for the ALD can be solid, liquid, and gaseous.…”

Section: Atomic Layer Depositionmentioning

confidence: 99%

“…The precursors for the ALD can be solid, liquid, and gaseous. ALD is carried out at an elevated temperature for increasing the precursor and the substrate reactivity, and accelerating the sorption process [25][26][27].…”

Section: Atomic Layer Depositionmentioning

confidence: 99%

See 2 more Smart Citations

ZnO Quasi-1D Nanostructures: Synthesis, Modeling, and Properties for Applications in Conductometric Chemical Sensors

2016

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Abstract:One-dimensional metal oxide nanostructures such as nanowires, nanorods, nanotubes, and nanobelts gained great attention for applications in sensing devices. ZnO is one of the most studied oxides for sensing applications due to its unique physical and chemical properties. In this paper, we provide a review of the recent research activities focused on the synthesis and sensing properties of pure, doped, and functionalized ZnO quasi-one dimensional nanostructures. We describe the development prospects in the preparation methods and modifications of the surface structure of ZnO, and discuss its sensing mechanism. Next, we analyze the sensing properties of ZnO quasi-one dimensional nanostructures, and summarize perspectives concerning future research on their synthesis and applications in conductometric sensing devices.

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Section: Atomic Layer Depositionmentioning

confidence: 99%

Section: Atomic Layer Depositionmentioning

confidence: 99%

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ZnO Quasi-1D Nanostructures: Synthesis, Modeling, and Properties for Applications in Conductometric Chemical Sensors

2016

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“…ALD film growth frequently occurs at lower temperatures compared to CVD processes because of the elimination of the gas-phase reactions. In ALD there is no shadow effect, which might reduce the growth rate if there is an object between the source and the target [52][53][54][55][56].…”

Section: Atomic Layer Depositon (Ald)mentioning

confidence: 99%

Technologies for deposition of transition metal oxide thin films: application as functional layers in “Smart windows” and photocatalytic systems

Gesheva

Ivanova

Bodurov

et al. 2016

J. Phys.: Conf. Ser.

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Abstract. "Smart windows" are envisaged for future low-energy, high-efficient architectural buildings, as well as for the car industry. By switching from coloured to fully bleached state, these windows regulate the energy of solar flux entering the interior. Functional layers in these devices are the transition metals oxides. The materials (transitional metal oxides) used in smart windows can be also applied as photoelectrodes in water splitting photocells for hydrogen production or as photocatalytic materials for self-cleaning surfaces, waste water treatment and pollution removal. Solar energy utilization is recently in the main scope of numerous world research laboratories and energy organizations, working on protection against conventional fuel exhaustion. The paper presents results from research on transition metal oxide thin films, fabricated by different methods -atomic layer deposition, atmospheric pressure chemical vapour deposition, physical vapour deposition, and wet chemical methods, suitable for flowthrough production process. The lower price of the chemical deposition processes is especially important when the method is related to large-scale glazing applications. Conclusions are derived about which processes are recently considered as most prospective, related to electrochromic materials and devices manufacturing. Transition metal oxidesTransition metal oxides (TMO) are claimed to be one of the most interesting classes of solids, exhibiting varieties of properties, structures and applications [1]. Their properties are determined by the unique nature of their outer d-electrons. Transition-metal oxides can be insulators, semiconductors, metals, or undergo semiconductor-metal transitions. Transition metal oxides possess unusual and useful electronic, optical and magnetic properties. Many of these properties strongly depend on materials defects like vacancies, dislocations, stacking faults and grain boundaries [2].

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“…In ALD the adsorption of reactants is self-limited and the various precursors meet only on the surface of the substrate [33,34].…”

Section: Atomic Layer Depositionmentioning

confidence: 99%

Review on one-dimensional nanostructures prepared by electrospinning and atomic layer deposition

Szilágyi¹,

Nagy²

2014

J. Phys.: Conf. Ser.

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Abstract. This paper reviews the various 1D nanostructures, which were prepared by electrospinning and atomic layer deposition (ALD). On the one hand, electrospinning served to make sacrificial polymer templates for the ALD growth; and thus various single or multilayer inorganic nanotubes were obtained. On the other hand, polymer, polymer/inorganic or inorganic nanowire templates were produced by electrospinning. By a consecutive ALD reaction various core/shell nanowires were synthesized.

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‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications

Cited by 147 publications

References 248 publications

ZnO Quasi-1D Nanostructures: Synthesis, Modeling, and Properties for Applications in Conductometric Chemical Sensors

ZnO Quasi-1D Nanostructures: Synthesis, Modeling, and Properties for Applications in Conductometric Chemical Sensors

Technologies for deposition of transition metal oxide thin films: application as functional layers in “Smart windows” and photocatalytic systems

Review on one-dimensional nanostructures prepared by electrospinning and atomic layer deposition

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