2001
DOI: 10.1109/16.944195
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OFF-State leakage current mechanisms in bulkSi and SOI MOSFETs and their impact on CMOS ULSIs standby current

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Cited by 54 publications
(13 citation statements)
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“…Although the threshold voltage of the dry etched sample is only 70 mV higher than that for the wet etched sample, the off-state leakage current for the dry etched structure increases dramatically. It is known that the off-state leakage current for MOS transistors is mainly determined by the sub-threshold off current, GIDL, and junction leakage currents [16]. From these data, it is evidently clear that plasma processing leads to the degradation of the transistor.…”
Section: Resultsmentioning
confidence: 99%
“…Although the threshold voltage of the dry etched sample is only 70 mV higher than that for the wet etched sample, the off-state leakage current for the dry etched structure increases dramatically. It is known that the off-state leakage current for MOS transistors is mainly determined by the sub-threshold off current, GIDL, and junction leakage currents [16]. From these data, it is evidently clear that plasma processing leads to the degradation of the transistor.…”
Section: Resultsmentioning
confidence: 99%
“…Figure 3 shows that the difference of 10 ff in n/pMOS can control the voltage level of intermediate state. In general, 10ff of MOSFET is determined by gate leakage and pn junction between SID and substrate [13,14]. The 10ff difference between n/pMOS is occurred by junction of source-substrate-drain, npn of nMOS and pnp of pMOS.…”
Section: Operation Principle Of Tri-state Invertermentioning
confidence: 99%
“…Assuming that the CMOS IC can be considered as composed of and "equivalent" number of two-input NAND, and two-input NOR gates, with effective transistor size [8], the average standby leakage power with and without considering the electro-thermal coupling is calculated at different initial ambient temperature, as shown in Fig.11. The coupling between the temperature and I OFF introduce much higher power consumption, which may in turn result in a high local temperature.…”
Section: Thermal Effects On Cmos Standby Powermentioning
confidence: 99%