In heavy ion (C+, N+) induced electron spectra ( E , < 30 eV) differential in angle and energy, of thin C (z = 370 nm), Cu (z = 100 nm), and AI (z = 160 nm) targets pronounced structures in forward direction superimposed on the flanks of the "true" secondary electron peak are observed. The energies of these structures are well correlated with the plasmon energies h o p of the materials in question. The present data offer good evidence for the existence of the single-electron deexcitation process of volume plasmons in thin solid films.I n winkel-und energiedifferentiellen, ioneninduzierten (C+, N+) Elektronenspektren (E, < < 30 eV) von diinnen C-(z = 370 nm), Cu-(5 = 100 nm) und AI-(z = 160 nm) Targets werden ausgepragte Strukturen in Vorwartsrichtung beobachtet, die den Flanken des ,,wahren" Maximum der Sekundiirelektronen uberlagert sind. Die Energien dieser Strukturen sind gut korreliert mit den Plasmon-Energien h 9 der in Frage stehenden Materialien. Die mitgeteilten Werte ergeben gute Hinweise fur die Existenz des Einelektronenzerfallsprozesses der Volumenplasmonen in dunnen Festkorperschichten.The description of solid materials in terms of a quasi-free electron gas implies the possible excitation of collective longitudinal oscillations of the electron plasma with discrete plasmon energies E = hop, op being the plasma frequency. Plasmons are of prime importance because they represent a direct proof of the existence of a collective excitation of the whole valence electron system in solids in contrast to the second kind of a low-lying excited state of a many-body system, the modified single-particle excitation [l].The excitation of plasmons can e.g. be induced by electrons (1 keV 5 EL 5 10 keV) penetrating thin solid films by inelastic collisions with the electron plasma [2, 31. Even in collisions of ions with solids plasmon generation has been reported [4, 51.The following deexcitation of plasmons may take place either by emission of light or by transformation into phonons or possibly by emission of quasi-free valence electrons. When escaping from the solid surface, those electrons produced by plasmon decay have to overcome the work function @ specific for the solid material. Their final kinetic energy E , is given by According to the above relation, the single-electron deexcitation of plasmons should lead to a n additional portion of electrons with discrete energies in the low energy electron spectra, superimposed on the monotonically decreasing "true" secondary electron background [6]. I n electron spectra induced by electron impact corresponding structures have been reported by several authors (see e.g. [7, 81). It is of importance 1) August-Euler-Str. 6, D-6000 Frankfurt (Main), FRG.