Observation of Element-Specific Energy-Filtered X-Ray Photoemission Electron Microscopy Images of Au on Ta Using a Wien Filter Type Energy Analyzer

Yasufuku, Hideyuki; Ohminami, Yusuke; Tsutsumi, Tetsuya; Niimi, Hironobu; Matsudaira, Nobuaki; Asakura, Kiyotaka; Katô, Makoto; Sakai, Yuji; Kitajima, Yoshinori; Iwasawa, Yasuhiro

doi:10.1143/jjap.43.7682

Cited by 11 publications

(10 citation statements)

References 23 publications

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“…25) Although an energy resolution of 0.1 eV has been calculated for this design, only 1 eV has been demonstrated so far, mainly because at higher resolution the intensity would be unacceptably low.…”

Section: )mentioning

confidence: 99%

Nanoscale Imaging and Spectroscopy with XPEEM

Heun

2005

Journal of The Surface Science Society of Japan

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The continuous miniaturization and increasing complexity of the materials used in modern technology requires to have access to chemical composition, electronic structure, magnetization, and fluctuations in these properties at sub-micron and nanometer scales. X-ray photoemission electron microscopy (XPEEM) can provide this information. The recent years have seen a strong increase in XPEEM activities worldwide. This paper reviews the present situation and future developments of XPEEM in combination with synchrotron radiation. In particular, the role of energy filtering, aberration correction, and temporal resolution is discussed. 1．IntroductionX-ray photoelectron spectroscopy (XPS) and the related technique , X-ray absorption spectroscopy (XAS), are powerful tools for the analysis of surfaces, as widely discussed in this issue. In a traditional experimental setup, the spectroscopic signal is obtained from a spot of some 100 µm to millimeters in diameter, and therefore averages over this area. On the other hand, the progress in modern nanotechnology has fueled an evergrowing demand to perform XPS and XAS from areas as small as the smallest building blocks of those nanostructures . This has triggered the development of special instruments which combine spectroscopy and microscopy and allow to perform XPS and XAS with the highest possible lateral resolution of less than 100 nm. 1)More than 10 years ago, two basic, complemetary design principles have been identified to achieve this goal:2) the scanning and the direct imaging type instruments. In the scanning type instruments the photon beam is demagnified, i.e. the X-rays are focused by an optical system (like a Fresnel zone plate or a Schwarzschild objective) on a small spot on the sample. The photoelectrons excited from this area are then collected by a detector. The lateral resolution of the instrument is given by the size of the illuminated area. A surface map can be obtained by scanning the sample relative to the beam. More details of this kind of instruments can be found in the article of T. Munakata in this issue.

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Section: )mentioning

confidence: 99%

Nanoscale Imaging and Spectroscopy with XPEEM

Heun

2005

Journal of The Surface Science Society of Japan

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“…Fig. 3 shows EXPEEM images of Au islands on the Ta sheet using photoelectrons with different kinetic energies [16,17]. The X-ray energy was fixed to 2380 eV.…”

Section: Expeem Images Of Au On Tamentioning

confidence: 99%

“…However, in the hemispherical energy analyzer, the electron optical axis is bent in the analyzer and is not preferable for microscopy optics alignment. We have developed an EXPEEM with a linear photoelectron energy analyzer: a Wien filter [15][16][17]. An important disadvantage of the Wien filter is that it requires the magnetic yokes that occupy a large part of the filter and reduce its effective bore diameter and sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Energy-filtered X-ray photoemission electron microscopy and its applications to surface and organic materials

Tsutsumi

Miyamoto

Niimi

et al. 2007

Solid-State Electronics

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“…The spatial resolution was estimated to be on the order of 300 nm at the slope of the Ag pattern corner, which is better than that of previous work. [21][22][23] The better spatial resolution results from the combination of the new objective lens of our XPEEM system and brilliant SR x-rays. Since there might be a certain degree of electric field effect on the PEEM spatial resolution for Ag column sample, this estimated resolution may have some error.…”

Section: B Energy Dispersion Spectral Images and Energy Filtered Imagesmentioning

confidence: 99%

On the wide-energy-range tuning of x-ray photoemission electron microscope optics for the observation of the photoelectrons excited by several keV x-rays

Yasufuku

Yoshikawa

Kimura

et al. 2006

Review of Scientific Instruments

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We have newly developed an x-ray photoemission electron microscope (XPEEM) which uses both soft x-rays and hard x-rays at the undulator beam line BL15XU in the synchrotron radiation (SR) facility SPring-8 to observe various practical materials. In combination with an energy analyzer and high brilliant x-ray source, the detection of high kinetic energy inner-shell photoelectrons is essential for revealing the chemical properties of specimen subsurfaces or buried interfaces, owing to long inelastic mean free path of the high kinetic energy photoelectrons. The most significant result in our design is the new combined electric and magnetic field objective lens in which the magnetic field penetrates up to the sample surface. This allows the measurement with high spatial resolution of both low intensity images of inner-shell photoelectrons with high kinetic energy and high intensity images of secondary electrons. By using the sample bias scan method, we can easily change the focus condition of the objective lens in order to allow the energy filtered imaging with photoelectrons having the kinetic energy in a wide range (1–10000eV). By the combination of high brilliant SR x-rays, the new objective lens, and sample bias method, our XPEEM can successfully obtain the microarea x-ray photoelectron spectra and energy filtered XPEEM images of inner-shell photoelectrons, such as Si 1s, without any surface cleaning procedure. The energy filtered XPEEM image using photoelectrons from deep inner shells, Si 1s, was obtained for the first time.

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Observation of Element-Specific Energy-Filtered X-Ray Photoemission Electron Microscopy Images of Au on Ta Using a Wien Filter Type Energy Analyzer

Cited by 11 publications

References 23 publications

Nanoscale Imaging and Spectroscopy with XPEEM

Nanoscale Imaging and Spectroscopy with XPEEM

Energy-filtered X-ray photoemission electron microscopy and its applications to surface and organic materials

On the wide-energy-range tuning of x-ray photoemission electron microscope optics for the observation of the photoelectrons excited by several keV x-rays

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