2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2020
DOI: 10.23919/sispad49475.2020.9241667
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Numerical study of surface chemical reactions in 2D-FET based pH sensors

Abstract: This work numerically evaluates the impact of surface chemical reactions on the performance of 2D-FET based pH sensors. More precisely, we focus on the adsorption of chlorine ions and the expulsion of protons at the sensing interface of FET sensor. This analysis is performed through numerical simulations encompassing the modelling of both the semiconductor device and the liquid solution to be analysed. In the semiconductor region the 2D Poisson -1D Continuity equations are self-consistently solved, while in th… Show more

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