2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and 2016
DOI: 10.1109/eurosime.2016.7463342
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Numerical study of near-optimal parameters of polymeric encapsulation layer containing a periodic array of piezoelectric nanowires used for force sensing

Abstract: This paper presents the results of finite element modeling and analysis of a dynamically loaded array of individually addressable vertical ZnO nanowires (piezopixels) encapsulated in a polymer, which is intended to function as a pressure sensor having the purpose of identification of fingerprints with very high spatial resolution. Two multiphysics models were implemented by formulating different conditions of mechanical interfacial coupling between the nanowires and the surrounding polymer (with and without co… Show more

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