2012
DOI: 10.1063/1.4768251
|View full text |Cite
|
Sign up to set email alerts
|

Numerical simulations of electrostatic interactions between an atomic force microscopy tip and a dielectric sample in presence of buried nano-particles

Abstract: Nanoscale tomography is an outstanding challenge with an urgent need in materials science. In this context, electrostatic force microscopy offers the possibility to investigate nanoparticles buried inside dielectric films. In this paper, finite element modeling has been performed to analyze their detectability with regard to both particles features (size and depth) and dielectric permittivity of the medium. In the case of charged particles, a sign dependence of the detectability was demonstrated by means of ob… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
12
0

Year Published

2015
2015
2021
2021

Publication Types

Select...
6
1

Relationship

1
6

Authors

Journals

citations
Cited by 16 publications
(12 citation statements)
references
References 20 publications
0
12
0
Order By: Relevance
“…The probing depth of EFM, to first order, is roughly proportional to the product of the dielectric constant ( ɛ ) and the tip–sample distance ( z ), that is, ɛz (refs 50 , 51 ). Taking the dielectric constant of HfO 2 (∼25) 52 and the present experimental parameters ( z =20 nm) into consideration, the probing depth can theoretically reach about 500 nm.…”
Section: Resultsmentioning
confidence: 99%
“…The probing depth of EFM, to first order, is roughly proportional to the product of the dielectric constant ( ɛ ) and the tip–sample distance ( z ), that is, ɛz (refs 50 , 51 ). Taking the dielectric constant of HfO 2 (∼25) 52 and the present experimental parameters ( z =20 nm) into consideration, the probing depth can theoretically reach about 500 nm.…”
Section: Resultsmentioning
confidence: 99%
“…Firstly, to accomplish the first condition, the force contrast between the matrix and particle/interphase assembly must be detectable. Thus, the contrast Δ F should be higher than the noise of 10 pN for soft cantilevers, typically [ 35 ]. Note that force gradient detection generally shows higher sensitivities than force detection.…”
Section: Results and Analysismentioning
confidence: 99%
“…The Hudle model allows approximately quantitative analyses on the capacitance and electrostatic force of the tip surface, but cannot guarantee the high testing symmetry and needs to be improved in accuracy by numerical methods. According to the Equivalent Charge Method (ECM), Arinero investigated the nanoparticles filled into dielectric film composites by finite-element simulations, and demonstrated that the electrostatic force detected by a conductive probe can be quantitatively analyzed by ECM independent of film thickness, tip radius and tip-sample distance [21][22][23]. Boularas proved by the finite-element simulations of electrostatic force between AFM tip and dielectric surface that the tip geometry has a great influence on the electrostatic force detection [24].…”
Section: Introductionmentioning
confidence: 99%