Numerical simulation research and applications on scattering imaging of surface defects on optical components

Chai, Huiting; Cao, Pin; Yang, Yongrong; Li, Chen; Wang, Fan; Zhang, Yihui; Xiong, Haoliang; Lin, Zhenzhi; Yan, Kai; Xu, Wenlin; Liu, Dong; Bai, Jian; Shen, Yibing

doi:10.1117/12.2245430

Cited by 4 publications

(1 citation statement)

References 14 publications

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“…In addition, there is the difference method to obtain image templates for image registration, and then perform bit operation with the image to be tested to obtain differences. In addition, the team of Yangyongying from Zhejiang University and Wangchangshu conducted in-depth research [12,13] . Based on the fact that the human eye can observe defects from different angles, a single main view camera can not recognize some defects better than the human eye, this paper combines the existing image recognition technology and template registration technology, adds a side view camera and light source, and verifies the effectiveness of the equipment in the industrial field [14,15,16] .…”

Section: Introductionmentioning

confidence: 99%

A defect detection device for OLED panels

Li,

Cao,

Tao

et al. 2024

International Conference on Mechatronic Engineering and Artificial Intelligence (MEAI 2023)

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In the production process of OLED, the test equipment of each process section is an important guarantee to improve the output. In this paper, a defect detection device for OLED panel is developed, including an electrical control unit, an image acquisition mechanism, a light source assembly and an industrial computer. Output the detection results by analyzing and processing the acquired images. The system has good real-time performance, high efficiency and strong detection ability in industrial field application. It solves the technical problems such as long detection time, low efficiency and strong subjectivity in manual detection of OLED panel defects.

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Section: Introductionmentioning

confidence: 99%

A defect detection device for OLED panels

Li,

Cao,

Tao

et al. 2024

International Conference on Mechatronic Engineering and Artificial Intelligence (MEAI 2023)

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Influence of Small-Size Contaminations on Thin Film Structural Properties^*

Grigoriev¹,

Сулимов²,

Zhang³

et al. 2019

Chinese Phys. Lett.

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An approach for studying the influence of nano-particles on the structural properties of deposited thin films is proposed. It is based on the molecular dynamic modeling of the deposition process in the presence of contaminating nano-particles. The nano-particle is assumed to be immobile and its interaction with film atoms is described by a spherically symmetric potential. The approach is applied to the investigation of properties of silicon dioxide films. Visualization tools are used to investigate the porosity associated with nano-particles. The structure of the film near the nano-particle is studied using the radial distribution function. It is found that fluctuations of film density near the nano-particles are essentially different in the cases of low-energy and high-energy deposition processes.

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Influence of light polarization state on the imaging quality of dark-field imaging system

Chen¹,

Wang²,

Zhang³

2022

J. Opt.

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Annular linear polarized light is used as the illumination source of the reflective dark-field detecting system in this paper. According to the theories of the Bidirectional Reflectance Distribution Function (BRDF) and multi-beam interference, the influence of the light polarization state on the intensity distribution of the scattering light is analyzed in detail. For surface defects, a simulation model of dark-field imaging is established based on the Finite-Difference Time-Domain method (FDTD). Both the near-field and the far-field scattering intensity distribution caused by surface defects are calculated under different illumination conditions. The incidence angle and polarization state of illumination light are optimized. Simulation and experimental results show that the image quality will be minimally affected by the interference effect while P-polarized light illuminates with the incident angle of 45°. The higher measurement accuracy of the dark-field imaging detection system can be obtained when the optimized illumination scheme is used.

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Numerical simulation research and applications on scattering imaging of surface defects on optical components

Cited by 4 publications

References 14 publications

A defect detection device for OLED panels

A defect detection device for OLED panels

Influence of Small-Size Contaminations on Thin Film Structural Properties^*

Influence of light polarization state on the imaging quality of dark-field imaging system

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Numerical simulation research and applications on scattering imaging of surface defects on optical components

Cited by 4 publications

References 14 publications

A defect detection device for OLED panels

A defect detection device for OLED panels

Influence of Small-Size Contaminations on Thin Film Structural Properties*

Influence of light polarization state on the imaging quality of dark-field imaging system

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Product

Resources

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Influence of Small-Size Contaminations on Thin Film Structural Properties^*