Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation

Pan, Cheng‐Tang; Shen, Shengchun; Hsieh, Chia‐Hsu; Chien, Chi Hui; Chen, Yung Chang

doi:10.1117/1.1794178

Cited by 2 publications

References 9 publications

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Micromachining by Photonic Beams

Tsai

Hocheng

Wang

et al. 2012

Advanced Analysis of Nontraditional Machining

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We analyze a laser dragging process capable of ablating a groove pattern, and producing sophisticated 3D features, on a polycarbonate (PC) sheet through a shaped mask opening. To predict the machined profile during the dragging process, we developed a mathematical model that describes the relationship between laser machining parameters and the produced profile. In addition, we manufacture a miniature lamp lens by varying the mask shape, and dimensions based on the proposed model. The effects of the micro-size lamp lens on light efficiency are investigated. On the other hand, this chapter also introduces a study of sub-micron-structure machining on silicon substrates by a direct writing system using a femtosecond laser with the central wavelength of 800 nm, pulse duration of 120 fs and repetition rate of 1 kHz. Three types of experiment are studied: (1) The effect of photoresist on silicon, (2) The machinability of different orientations of silicon: spike morphologies were observed on all three orientations of silicon substrates without obvious directional difference of these spikes on the different silicon substrates, (3) Micro-structure size and cross-section shape: a numerical model of the machining parameters has been proposed to simulate the cross-section of the micro-structure resulting from a given ablation energy. The predicted shape, determined by simulation, fitted the profile of the cross-section shape well.

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Micromachining by Photonic Beams

Tsai

Hocheng

Wang

et al. 2012

Advanced Analysis of Nontraditional Machining

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An ultra-precision scanning tunneling microscopeZ-scanner for surface profile measurement of large amplitude micro-structures

Goto¹,

Hosobuchi²,

Gao³

2011

Meas. Sci. Technol.

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This paper presents an ultra-precision STM Z-scanner for surface profile measurement of micro-structures with large amplitudes on the order of several tens of micrometers. The Z-scanner consists of an STM probe, a long stroke PZT actuator with a full stroke of 70 µm, and a linear encoder. The linear encoder is employed to accurately measure a Z-directional displacement of a STM probe tracking a sample surface. The linear encoder yields a least significant bit resolution of 0.5 nm over the full stroke of the actuator. The peak-to-valley value of the Z-scanner nonlinearity is smaller than 10 nm over an effective measurement range of 50 µm. Experiments of surface profile measurement of samples with micro-structures were carried out by combining the Z-scanner and an X-directional PZT scanning stage, on which the sample is mounted. The feasibility of the developed ultra-precision Z-scanner has been confirmed from the measurement results.

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Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation

Cited by 2 publications

References 9 publications

Micromachining by Photonic Beams

Micromachining by Photonic Beams

An ultra-precision scanning tunneling microscopeZ-scanner for surface profile measurement of large amplitude micro-structures

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