Numerical Investigation of Effect of Temperature Profile Imposed on the Crucible Surface on Oxygen Incorporated at the Crystal Melt Interface for 450 mm Diameter Silicon Single Crystal Growth in Presence of CUSP Magnetic Field Using Czochralski Technique

Vegad, Mitesh; Bhatt, Nilesh M.

doi:10.1007/s12633-020-00655-3

Cited by 3 publications

(1 citation statement)

References 34 publications

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“…Recent studies have shown that the use of CMF can effectively inhibit melt convection and reduce oxygen content in the crystal [6,[11][12][13][14][15][16]. However, there are important issues regarding CMF that require further investigation, particularly the optimal position of the zero-Gaussian plane (ZGP).…”

Section: Introductionmentioning

confidence: 99%

Three-Dimensional Simulation of Melt Convection and Oxygen Transport in CZ-Si Crystal Growth with Cusp Magnetic Fields

Cen,

Guo

2023

Crystals

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The application of magnetic fields has become a standard control technique in the CZ-Si growth industry. To investigate the impact of cusp-shaped magnetic fields (CMF) on heat and mass transfer in the melt, a series of transient three-dimensional simulations were conducted for the growth of a 100 mm CZ-Si crystal with a cylindrical crucible. The turbulent melt motion was modeled using the large eddy simulation (LES) method. Six configurations of CMF with various zero-Gaussian plane (ZGP) positions were examined and numerically compared. The computed results showed that different ZGP positions resulted in distinct types of melt convection, buoyant plumes, and thermal waves. Additionally, it was observed that the studied CMF configurations effectively reduced oxygen dissolution from the crucible wall along with oxygen impurity incorporation into the crystal. These findings demonstrate the potential for precise control of the heat and mass transfer process in CZ-Si growth through the application of suitable CMF.

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Section: Introductionmentioning

confidence: 99%

Three-Dimensional Simulation of Melt Convection and Oxygen Transport in CZ-Si Crystal Growth with Cusp Magnetic Fields

Cen,

Guo

2023

Crystals

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Design and optimization of superconducting CUSP electromagnetic field structure based on a COMSOL-GMDH-MOSO hybrid strategy

Wang

Gao

et al. 2023

Results in Physics

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Research on Abnormal State Detection of CZ Silicon Single Crystal Based on Multimodal Fusion

Jiang,

Wei,

Liu

2024

Sensors

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The Czochralski method is the primary technique for single-crystal silicon production. However, anomalous states such as crystal loss, twisting, swinging, and squareness frequently occur during crystal growth, adversely affecting product quality and production efficiency. To address this challenge, we propose an enhanced multimodal fusion classification model for detecting and categorizing these four anomalous states. Our model initially transforms one-dimensional signals (diameter, temperature, and pulling speed) into time–frequency domain images via continuous wavelet transform. These images are then processed using a Dense-ECA-SwinTransformer network for feature extraction. Concurrently, meniscus images and inter-frame difference images are obtained from the growth system’s meniscus video feed. These visual inputs are fused at the channel level and subsequently processed through a ConvNeXt network for feature extraction. Finally, the time–frequency domain features are combined with the meniscus image features and fed into fully connected layers for multi-class classification. The experimental results show that the method can effectively detect various abnormal states, help the staff to make a more accurate judgment, and formulate a personalized treatment plan for the abnormal state, which can improve the production efficiency, save production resources, and protect the extraction equipment.

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Numerical Investigation of Effect of Temperature Profile Imposed on the Crucible Surface on Oxygen Incorporated at the Crystal Melt Interface for 450 mm Diameter Silicon Single Crystal Growth in Presence of CUSP Magnetic Field Using Czochralski Technique

Cited by 3 publications

References 34 publications

Three-Dimensional Simulation of Melt Convection and Oxygen Transport in CZ-Si Crystal Growth with Cusp Magnetic Fields

Three-Dimensional Simulation of Melt Convection and Oxygen Transport in CZ-Si Crystal Growth with Cusp Magnetic Fields

Design and optimization of superconducting CUSP electromagnetic field structure based on a COMSOL-GMDH-MOSO hybrid strategy

Research on Abnormal State Detection of CZ Silicon Single Crystal Based on Multimodal Fusion

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