Three-Dimensional Simulation of Melt Convection and Oxygen Transport in CZ-Si Crystal Growth with Cusp Magnetic Fields
Xianrong Cen,
Shuangxi Guo
Abstract:The application of magnetic fields has become a standard control technique in the CZ-Si growth industry. To investigate the impact of cusp-shaped magnetic fields (CMF) on heat and mass transfer in the melt, a series of transient three-dimensional simulations were conducted for the growth of a 100 mm CZ-Si crystal with a cylindrical crucible. The turbulent melt motion was modeled using the large eddy simulation (LES) method. Six configurations of CMF with various zero-Gaussian plane (ZGP) positions were examine… Show more
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