1992
DOI: 10.1002/pssa.2211320202
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Nucleation and Selective Deposition of Diamond Thin Films

Abstract: Diamond has great potential for electronic, optical, mechanical, chemical, and nuclear applications due to its superior properties. However, natural diamond is rare and expensive, being a metastable phase at normal pressure and temperature. The diamond synthesis at high temperatures and high pressures (HTHP), where diamond is a stable phase [l], was a breakthrough for large scale industrial applications. However, synthetic diamond is used mainly in abrasive and cutting tools industries [2], the crystals obtain… Show more

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Cited by 46 publications
(6 citation statements)
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“…Diamond nucleation on non-diamond surfaces can be enhanced by the surface pretreatments, with ultrasonic-scratching and biasing having the best efficacy on nucleation enhancement, followed by scratching, seeding, covering/coating, and ion implantation, etc., as summarized in Table 5. Nucleation on pretreated surfaces is observed to occur primarily on carbon-rich particles or defects, such as scratches, grain boundaries, particle boundaries, dislocations, electron bombardment damages, and edges of etch pits/craters [39,72,75,79]. Pulsed laser irradiation + coating a-C, WC, cBN layer enhancement [106] Carburization enhancement [31,70] As schematically depicted in Figure 4 [72], nucleation enhancement by scratching is attributed to (a) seeding effect [78,98,107], (b) minimization of interfacial energy on sharp convex surfaces [20,108], (c) breaking of a number of surface bonds or presence of a number of dangling bonds at sharp edges [100], (d) strain field effects [105], (e) rapid carbon saturation (fast carbide formation) at sharp edges [72,109], and (f) removal of surface oxides [39,100].…”
Section: Surface Pretreatment Methods and Nucleation Enhancement Mechmentioning
confidence: 99%
See 1 more Smart Citation
“…Diamond nucleation on non-diamond surfaces can be enhanced by the surface pretreatments, with ultrasonic-scratching and biasing having the best efficacy on nucleation enhancement, followed by scratching, seeding, covering/coating, and ion implantation, etc., as summarized in Table 5. Nucleation on pretreated surfaces is observed to occur primarily on carbon-rich particles or defects, such as scratches, grain boundaries, particle boundaries, dislocations, electron bombardment damages, and edges of etch pits/craters [39,72,75,79]. Pulsed laser irradiation + coating a-C, WC, cBN layer enhancement [106] Carburization enhancement [31,70] As schematically depicted in Figure 4 [72], nucleation enhancement by scratching is attributed to (a) seeding effect [78,98,107], (b) minimization of interfacial energy on sharp convex surfaces [20,108], (c) breaking of a number of surface bonds or presence of a number of dangling bonds at sharp edges [100], (d) strain field effects [105], (e) rapid carbon saturation (fast carbide formation) at sharp edges [72,109], and (f) removal of surface oxides [39,100].…”
Section: Surface Pretreatment Methods and Nucleation Enhancement Mechmentioning
confidence: 99%
“…Surface nucleation densities and rates on non-diamond substrates vary from 10 3 to 10 11 cm -2 [24,39,40,41,[74][75][76][77][78], and from 10 3 to 10 8 cm -2 h -1 [79] (10 9 to 10 10 cm -2 h -1 , as estimated from the measured data in [40]), respectively, depending on substrate materials, surface pretreatment methods, and synthesis conditions.…”
Section: Nucleation On An Intermediate Layer Of Graphitementioning
confidence: 99%
“…Good early reviews on nucleation and selective growth of diamond films have been presented in [15]. Today it is generally accepted that the nucleation and the following DF formation on carbide-forming substrates proceeds through six stages (Figure 2).…”
Section: Initial Findingsmentioning
confidence: 99%
“…Area selective diamond growth has been reported in the literature [3][4][5][6][7][8][9][10][11] as the practical alternative to removing undesired parts of a CVD diamond film by mechanical cutting or chemical means. The methods for patterning diamond films onto nondiamond substrates that have been reported in the literature [3][4][5][6][7][8][9][10][11] generally require a series of surface pretreatment steps involving, at some point, the use of a photoresist or a silk-screen mask.…”
Section: Introductionmentioning
confidence: 99%