Diamond Nucleation from Activated Vapor Phase

Abstract

A short review of diamond homogeneous and heterogeneous nucleation as initial stage of activated CVD of diamond is given. Special emphasis is laid on the most important parameters of the process like substrate nature, its temperature and geometry, and on content and pressure of the vapor phase, as well. It indicates one of most influential parameters, i.e., substrate biasing and several independent explanations of the effect are put forward. Some important fields of application, critically dependent on knowledge and skill in nucleation have been indicated.