Novel Ultrananocrystalline Diamond Probes for High‐Resolution Low‐Wear Nanolithographic Techniques

Kim, Keun-Ho; Moldovan, N.; Ke, Changhong; Espinosa, Horacio D.; Xiao, Xingcheng; Carlisle, John A.; Auciello, Orlando

doi:10.1002/smll.200500028

Cited by 62 publications

(50 citation statements)

References 31 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…13b) [139] for imaging micromachining applications. [140] These films then came to be used as structural materials in MEMS [141][142][143][144][145][146] and NEMS [52,53,55] as high-frequency, high-Q mechanical resonators, [146] micromechanical switches, [147,148] and inkjets for corrosive liquids. [144] As conformal coatings, they have been used for the passivation of surfaces and the fabrication of scanning probe microscopy (SPM) cantilevers, [49,91] and efficient field emitters (Fig.…”

Section: Applicationsmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

338

261

View full text Add to dashboard Cite

The growth and characteristics of nanocrystalline diamond thin films with thicknesses from 20 nm to less than 5 mm are reviewed. These materials contain between 95% and >99.9% diamond crystallites, the balance being made up from other forms of carbon. Within this class of materials there is a continuous range of composition, characteristics, and properties which depend on the nucleation and growth conditions. It is convenient to classify these films as either ultra-nanocrystalline-diamond (UNCD) or nanocrystalline-diamond (NCD) based on their microstructure, properties, and growth environment. In general, UNCD materials are composed of small particles of diamond ca. 2-5 nm in size with sp 2 -carbon bonding between the particles. UNCD is usually grown in argon-rich, hydrogen-poor CVD environments, and may contain up to 95-98% sp 3 -bonded carbon. NCD materials start with high density nucleation, initiating nanometer-sized diamond domains which grow in a columnar manner with the grain size coarsening with thickness. NCD is generally grown in carbon-lean and hydrogen-rich environments. NCD and UNCD exhibit an interesting range of physical properties which find use in X-ray windows and lithography, micro-and nanomechanical and optical resonators, tribological shaft seals and atomic force microscopy (AFM) probes, electron field emitters, platforms for chemical and DNA sensing, and many other applications.

show abstract

Section: Applicationsmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

338

261

View full text Add to dashboard Cite

show abstract

“…An analogous comparison of theory and experiment arises in studies in the fracture of nanoscale diamond crystals. Interest in this material arises because of the development of ultrananocrystalline diamond (UNCD) films as potentially important coatings in the manufacture of microelectrical mechanical systems (MEMS) devices (64)(65)(66)(67)(68). UNCD consists of few-nanometer diamond crystallites that meet at atom-wide grain boundaries (69).…”

Section: Mechanical Propertiesmentioning

confidence: 99%

Using theory and computation to model nanoscale properties

Schatz

2007

Proc. Natl. Acad. Sci. U.S.A.

102

View full text Add to dashboard Cite

This article provides an overview of the use of theory and computation to describe the structural, thermodynamic, mechanical, and optical properties of nanoscale materials. Nanoscience provides important opportunities for theory and computation to lead in the discovery process because the experimental tools often provide an incomplete picture of the structure and/or function of nanomaterials, and theory can often fill in missing features crucial to understanding what is being measured. However, there are important challenges to using theory as well, as the systems of interest are usually too large, and the time scales too long, for a purely atomistic level theory to be useful. At the same time, continuum theories that are appropriate for describing larger-scale (micrometer) phenomena are often not accurate for describing the nanoscale. Despite these challenges, there has been important progress in a number of areas, and there are exciting opportunities that we can look forward to as the capabilities of computational facilities continue to expand. Some specific applications that are discussed in this paper include: self-assembly of supramolecular structures, the thermal properties of nanoscale molecular systems (DNA melting and nanoscale water meniscus formation), the mechanical properties of carbon nanotubes and diamond crystals, and the optical properties of silver and gold nanoparticles. molecular dynamics ͉ nanomaterials ͉ nanoparticle ͉ plasmon ͉ self-assembly N anoscience deals with the behavior of matter on length scales where a large number of atoms play a role, but where the system is still small enough that the material does not behave like bulk matter. For example, a 5-nm gold particle, which contains on the order of 10 5 atoms, absorbs light strongly at 520 nm, whereas bulk gold is reflective at this wavelength and small clusters of gold atoms have absorption at shorter wavelengths. The special properties associated with nanoscale systems like this have provided both challenges and opportunities for the use of theory and computation to play a role in the discovery process. The challenges arise from the fact that most theories that describe the properties of matter by using first-principles approaches in which all atoms (and even all electrons in these atoms) are explicitly described are close to or (more often) beyond their capability to describe such systems, even using the largest computer available. At the same time, continuum theories, which play such a useful role for micrometer-scale systems, are sometimes incapable of describing nanoscale properties due to incomplete incorporation of the underlying physics in the size-dependent materials parameters. However, the opportunities for theory to play a role are significant, as nanoscience often provides the smallest systems that are amenable to study using methods that involve macroscopic manipulation of nanoscale structures. Thus, it is possible to measure the structure and thermal properties of a single supramolecular assembly, observe the thermal ...

show abstract

“…Many application areas are envisioned for the exploitation of NCD such as tribology [3], optical coatings [4], electrochemistry [5], thermal management [6] and micro/nano electromechanical systems [7]. Recently, boron doped nanocrystalline diamond has been demonstrated as a novel material for superconductive Nano-Electro-Mechanical Systems (NEMS) devices [8].…”

Section: Introductionmentioning

confidence: 99%