Novel transparent MgSiON thin films with high hardness and refractive index

Ali, Sharafat; Paul, Biplab; Magnusson, Roger; Greczyński, Grzegorz; Broitman, Esteban; Jonson, Bo; Eklund, Per; Birch, Jens

doi:10.1016/j.vacuum.2016.05.023

Cited by 16 publications

(15 citation statements)

References 43 publications

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“…No systemic relation was observed between the N content and the Ca content. This is different from the Mg-Si-O-N system[46], where an increase of the Ncontent was accompanied roughly by a corresponding increase of the Mg content. The low nitrogen content in the Ca-Si-O-N system as compared to the Mg-Si-O-N system [46] is probably due to the fact that Ca metal has higher affinity to oxygen and low affinity towards nitrogen as compared with Mg.…”

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confidence: 69%

“…The motivation for this study comes from the results of our recent studies in Mg-Si-O-N thin films system [46] which shows that the float glass coated with Mg-Si-O-N thing films have superior mechanical ( Hardness and reduced elastic modulus) and optical ( refractive index) properties as compared to the uncoated float glass. Furthermore, the coated surfaces have higher hardness than pure Si 3 N 4 (17 GPa) and SiON (14 GPa) [27] and comparable with the crystalline α-Al 2 O 3 (22 GPa) [47].…”

Section: Accepted Manuscriptmentioning

confidence: 99%

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Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering

Ali

Paul

Magnusson

et al. 2017

Surface and Coatings Technology

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Ca-Si-ON thin films were deposited on commercial soda-lime silicate float glass, silica wafers and sapphire substrates by RF magnetron co-sputtering from Ca and Si targets in an Ar/N 2 /O 2 gas mixture. Chemical composition, surface morphology, hardness, reduced elastic modulus and optical properties of the films were investigated using X-ray photoelectron spectroscopy, scanning electron microscopy, nanoindentation, and spectroscopic ellipsometry. It was found that the composition of the films can be controlled by the Ca target power, predominantly, and by the reactive gas flow. Thin films in the Ca-Si-ON system are composed of N and Ca contents up to 31 eq. % and 60 eq. %, respectively. The films thickness ranges from 600 to 3000 nm and increases with increasing Ca target power. The films surface roughness varied between 2 and 12 nm, and approximately decreases with increasing power of Ca target. The hardness (4-12 GPa) and reduced elastic modulus (65-145 GPa) of the films increase and decrease with the N and Ca contents respectively. The refractive index (1.56-1.82) is primarily dictated by the N content. The properties are compared with findings for bulk glasses in the Ca-Si-(Al)-ON systems, and it is concluded that Ca-Si-ON thin films have higher values of hardness, elastic modulus and refractive index than bulk glasses of similar composition.

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confidence: 69%

Section: Accepted Manuscriptmentioning

confidence: 99%

Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering

Ali

Paul

Magnusson

et al. 2017

Surface and Coatings Technology

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“…However, both 14 N (spin-1; 99.63%) and 15 N (spin-1/2; 0.37%) NMR of these glasses are difficult, and the latter, easier isotope, requires enrichment. Limited examples of 15 N NMR in glasses have appeared in the literature, for example, in the study of oxynitride glasses [106], but the approach has not been widely adopted, even with the current high level of interest in the mechanical and optical properties of these oxynitride glasses [107]. …”

Section: Current State Of Glass Nmrmentioning

confidence: 99%

NMR Spectroscopy in Glass Science: A Review of the Elements

Youngman

2018

Materials

152

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The study of inorganic glass structure is critically important for basic glass science and especially the commercial development of glasses for a variety of technological uses. One of the best means by which to achieve this understanding is through application of solid-state nuclear magnetic resonance (NMR) spectroscopy, which has a long and interesting history. This technique is element specific, but highly complex, and thus, one of the many inquiries made by non-NMR specialists working in glass science is what type of information and which elements can be studied by this method. This review presents a summary of the different elements that are amenable to the study of glasses by NMR spectroscopy and provides examples of the type of atomic level structural information that can be achieved. It serves to inform the non-specialist working in glass science and technology about some of the benefits and challenges involved in the study of inorganic glass structure using modern, readily-available NMR methods.

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“…Oxynitride glasses prepared via sol-gel methods are also comparatively more transparent, and silicon-free oxynitride glasses, e.g., P-O-N based, are in contrast transparent. Recently, Sharafat et al [23][24][25] The obtained glasses were examined by X-ray powder diffraction (XRPD), using a Panalytical X'pert PRO MPD diffractometer and CuK α1 radiation. Samples were analysed by light microscope and scanning electron microscopy to observe the surface morphology.…”

Section: Introductionmentioning

confidence: 99%

Investigation of instinctive defects in nitrogen enrich lanthanum silicon oxynitride glasses

Ali¹,

Hakeem²,

Höche³

et al. 2020

Preprint

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Oxynitride glasses are not yet commercialised primarily due to the impurities present in the network of these glasses. In this work, silicon and silicide defects in nitrogen-rich La-Si-O-N glasses were investigated. Glasses were prepared by heating powder mixture of La metal, Si 3 N 4 , and SiO 2 in a nitrogen atmosphere at 1650-1800°C. The obtained glasses containing an unprecedented amount of N content of up to 68 e/o and La up to 62 e/o in the glass network which reveals a broader glass-forming region in the system than previously reported. The microstructure and impurities in the glasses were examined by optical microscopy, scanning electron microscopy (SEM), and transmission electron microscopy (TEM) in conjunction with electron energy-loss spectroscopy (EELS). Analyses showed that the glasses contain a small amount of spherical La silicides particles, mostly amorphous or poorly crystalline, and having sizes typically ranging from 1 µm and less. The amount of silicide was estimated to be less than 2 vol.%. There was no systematic relation between silicide formation and glass composition or preparation temperature, but it was found that particle size decrease with increasing holding time. The limited transparency of high N-containing glasses is expected to have attribution of elemental Si and microscopy analyses, and Raman spectroscopy ascertained silicide particles. Furthermore, a metallic silicide formed by the decomposition of silicon oxide and silicon nitride, then the subsequent reaction of Si and La.

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Novel transparent MgSiON thin films with high hardness and refractive index

Cited by 16 publications

References 43 publications

Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering

Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering

NMR Spectroscopy in Glass Science: A Review of the Elements

Investigation of instinctive defects in nitrogen enrich lanthanum silicon oxynitride glasses

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