Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering

Ali, Sharafat; Paul, Biplab; Magnusson, Roger; Broitman, Esteban; Jonson, Bo; Eklund, Per; Birch, Jens

doi:10.1016/j.surfcoat.2017.02.033

Cited by 13 publications

(13 citation statements)

References 57 publications

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“…The thin films in Mg-Si-O-N system have higher content of N and Mg as compared to the bulk glass prepared by melt quenching or sol-gel techniques in the same system[12,24]. The high nitrogen content in the Mg-Si-O-N thin films as compared to the Ca-Si-O-N thin films[11] prepared under similar conditions might be due to the high affinity of Mg towards nitrogen. A similar trend has been observed in bulk Mg/Ca-Si-O-N glasses[12].…”

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confidence: 93%

Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering

Ali

Paul

Magnusson

et al. 2019

Surface and Coatings Technology

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In this work, amorphous thin films in Mg-Si-O-N system typically containing > 15 at.%, Mg and 35 at.%, N were prepared in order to investigate especially the dependence of optical and mechanical properties on Mg composition. Reactive RF magnetron co-sputtering from magnesium and silicon targets were used for the deposition of Mg-Si-O-N thin films. Films were deposited on float glass, silica wafers and sapphire substrates in an Ar, N2 and O2 gas mixture. X-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, spectroscopic ellipsometry, and nanoindentation were employed to characterize the composition, surface morphology, and properties of the films. The films consist of N and Mg contents up to 40 at.% and 28 at.%, respectively and have good adhesion to substrates and are chemically inert. The thickness and roughness of the films increased with increasing content of Mg. Both Hardness (16 -21 GPa) and reduced elastic modulus (120 -176 GPa) are strongly correlated with the amount of Mg content. The refractive index up to 2.01 and extinction coefficient up to 0.18 were found to increase with Mg content. The optical band gap (3.1 -4.3) decreases with increasing the Mg content. Thin film deposited at substrate temperature of 100 o C shows a lower value of hardness ( 10 GPa), refractive index (1.75), and higher values of reduced elastic modulus (124 GPa) as compared to the thin film deposited at 310 o C and 510 o C respectively, under identical synthesis parameters.

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confidence: 93%

Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering

Ali

Paul

Magnusson

et al. 2019

Surface and Coatings Technology

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“…Oxynitride glasses prepared via sol-gel methods are also comparatively more transparent, and silicon-free oxynitride glasses, e.g., P-O-N based, are in contrast transparent. Recently, Sharafat et al [23][24][25] The obtained glasses were examined by X-ray powder diffraction (XRPD), using a Panalytical X'pert PRO MPD diffractometer and CuK α1 radiation. Samples were analysed by light microscope and scanning electron microscopy to observe the surface morphology.…”

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confidence: 99%

Investigation of instinctive defects in nitrogen enrich lanthanum silicon oxynitride glasses

Ali¹,

Hakeem²,

Höche³

et al. 2020

Preprint

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Oxynitride glasses are not yet commercialised primarily due to the impurities present in the network of these glasses. In this work, silicon and silicide defects in nitrogen-rich La-Si-O-N glasses were investigated. Glasses were prepared by heating powder mixture of La metal, Si 3 N 4 , and SiO 2 in a nitrogen atmosphere at 1650-1800°C. The obtained glasses containing an unprecedented amount of N content of up to 68 e/o and La up to 62 e/o in the glass network which reveals a broader glass-forming region in the system than previously reported. The microstructure and impurities in the glasses were examined by optical microscopy, scanning electron microscopy (SEM), and transmission electron microscopy (TEM) in conjunction with electron energy-loss spectroscopy (EELS). Analyses showed that the glasses contain a small amount of spherical La silicides particles, mostly amorphous or poorly crystalline, and having sizes typically ranging from 1 µm and less. The amount of silicide was estimated to be less than 2 vol.%. There was no systematic relation between silicide formation and glass composition or preparation temperature, but it was found that particle size decrease with increasing holding time. The limited transparency of high N-containing glasses is expected to have attribution of elemental Si and microscopy analyses, and Raman spectroscopy ascertained silicide particles. Furthermore, a metallic silicide formed by the decomposition of silicon oxide and silicon nitride, then the subsequent reaction of Si and La.

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“…In contrast, silicon-free oxynitride glasses, e.g., P−O−N-based, and oxynitride glasses prepared via sol–gel methods are transparent. Recently, Sharafat et al [ 23 , 24 , 25 ] have reported amorphous transparent thin films in the nitrogen enrich Mg/Ca−Si−O−N systems prepared by reactive RF magnetron co-sputtering from Mg/Ca and Si targets in an N 2 /O 2 /Ar gas mixture. These thin films are free from elemental silicon and metallic silicides impurities, as found in bulk Mg/Ca−Si−O−N systems and contain an unprecedented amount of modifier and nitrogen.…”

Section: Introductionmentioning

confidence: 99%

Microstructure Evaluation and Impurities in La Containing Silicon Oxynitrides

et al. 2021

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Oxynitride glasses are not yet commercialised primarily due to the impurities present in the network of these glasses. In this work, we investigated the microstructure and instinctive defects in nitrogen rich La-Si-O-N glasses. Glasses were prepared by heating a powder mixture of pure La metal, Si3N4, and SiO2 in a nitrogen atmosphere at 1650–1800 °C. The microstructure and impurities in the glasses were examined by optical microscopy, scanning electron microscopy, atomic force microscopy, and transmission electron microscopy in conjunction with electron energy-loss spectroscopy. Analyses showed that the glasses contain a small amount of spherical metal silicide particles, mostly amorphous or poorly crystalline, and having sizes typically ranging from 1 µm and less. The amount of silicide was estimated to be less than 2 vol. %. There was no systematic relation between silicide formation and glass composition or preparation temperature. The microstructure examination revealed that the opacity of these nitrogen rich glasses is due to the elemental Si arise from the decomposition reaction of silicon nitride and silicon oxide, at a high temperature above ~1600 °C and from the metallic silicide particles formed by the reduction of silicon oxide and silicon nitride at an early stage of reaction to form a silicide intermetallic with the La metal.

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Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering

Cited by 13 publications

References 57 publications

Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering

Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering

Investigation of instinctive defects in nitrogen enrich lanthanum silicon oxynitride glasses

Microstructure Evaluation and Impurities in La Containing Silicon Oxynitrides

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