Novel test strategy for statistical evaluation of defect density and reliability of contacts and vias

Cabrini, A.; Cantarelli, D.; Cappelletti, P.; Casiraghi, R.; Iezzi, D.; Lombardi, Celia M.; Maurelli, A.; Pasotti, M.; Rolandi, P.L.; Torelli, G.

doi:10.1109/relphy.2005.1493201

2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005

DOI: 10.1109/relphy.2005.1493201

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Novel test strategy for statistical evaluation of defect density and reliability of contacts and vias

A. Cabrini

D. Cantarelli²,

P. Cappelletti³

et al.

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Novel test strategy for statistical evaluation of defect density and reliability of contacts and vias

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