Novel temperature compensation technique for force-sensing piezoresistive devices

Abstract

A novel stress-insensitive piezoresistor in the shape of an annulus has been developed to be used in conjunction with a piezoresistive bridge for temperature-compensated force measurements. Under uniform stress conditions, the annular resistor shows near-zero stress sensitivity and a linear response to temperature excitation within test conditions of 24-34 • C. Annular resistors were placed in close proximity to stress-sensitive elements in order to detect local temperature fluctuations. Experiments evaluating the performance of the temperature compensator while testing force sensitivity showed a thermal rejection ratio of 37.2 dB and near elimination of low-frequency noise (drift) below 0.07 Hz. Potential applications of this annular resistor include use in multi-axis force sensors for force feedback microassembly, improvements in the simplicity and robustness of high precision microgram sensitive balances, higher accuracy for silicon diaphragm-based pressure sensors and simple temperature compensation for AFM cantilevers.

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