Novel technique for low-jitter dual-laser synchronization in a thin film deposition system

Mukherjee, Pritish; Cuff, John B.; Witanachchi, Sarath

doi:10.1063/1.1367359

Cited by 2 publications

(1 citation statement)

References 15 publications

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“…32 As opposed to standard electronic triggering techniques, we used the optical flash from the high voltage discharge of the CO 2 laser to trigger the KrF laser. 32 As opposed to standard electronic triggering techniques, we used the optical flash from the high voltage discharge of the CO 2 laser to trigger the KrF laser.…”

Section: Film Growthmentioning

confidence: 99%

Evidence for the physical basis and universality of the elimination of particulates using dual-laser ablation. I. Dynamic time-resolved target melt studies, and film growth of Y2O3 and ZnO

Mukherjee

Chen

Cuff

et al. 2002

Journal of Applied Physics

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Articles you may be interested inNanometric multiscale rough Zn-ZnO superhydrophobic thin films: Self-diffusion of zinc and effect of UV irradiation Evidence for the physical basis and universality of the elimination of particulates using dual-laser ablation. II. Dynamic time-resolved target reflectivity of metals and film growth of ZnThe application of a dual-laser ablation process, incorporating the addition of a synchronized CO 2 laser to the traditional excimer ͑KrF͒ laser used for the ablation of targets in thin film deposition, has been previously demonstrated to be effective in the elimination of particulates in films of Y 2 O 3 ͓J. Vac. Sci. Technol. A 13, 1171 ͑1995͔͒. It has been hypothesized that the efficacy of particulate removal is related to phase transformation from the solid to liquid phase prior to excimer laser ablation of the target material. In this series of two articles we present direct physical evidence of the dynamics of the phase transformation occurring on the target surface and its effect on the morphology of film growth. Pump-probe experiments have been conducted using the CO 2 laser to probe the dynamic reflectivity of the target surface on the nanosecond timescale. These experiments were conducted for a range of materials spanning a wide range of thermal conductivity including a low thermal conductivity insulator (Y 2 O 3 ), and a sublimating oxide ͑ZnO͒, as well as a high thermal conductivity metal ͑Zn͒ to assess the universal applicability of the results. In this article ͑Part I͒ the results of these dynamic reflectivity experiments are correlated with previously reported particulate-free deposition of thin films of Y 2 O 3 . Similar experiments are conducted for ZnO. In both cases, the reflectivity measurements yielded times for the onset of melt at a variety of CO 2 laser fluences. Synchronization of the KrF laser to coincide with the onset of melt resulted in particulate-free film growth. The effect of mistiming on the quality of the deposited film is presented for ZnO.

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Section: Film Growthmentioning

confidence: 99%

Evidence for the physical basis and universality of the elimination of particulates using dual-laser ablation. I. Dynamic time-resolved target melt studies, and film growth of Y2O3 and ZnO

Mukherjee

Chen

Cuff

et al. 2002

Journal of Applied Physics

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Role of dual-laser ablation in controlling the Pb depletion in epitaxial growth of Pb(Zr0.52Ti0.48)O3 thin films with enhanced surface quality and ferroelectric properties

Mukherjee

Hyde

Mukherjee

et al. 2012

Journal of Applied Physics

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Pb depletion in Pb(Zr0.52Ti0.48)O3 (PZT) thin films has remained as a major setback in the growth of defect-free PZT thin films by pulsed laser ablation techniques. At low excimer (KrF) laser fluences, the high volatility of Pb in PZT leads to non-congruent target ablation and, consequently, non-stoichiometric films, whereas, at high laser fluences, the inherent ejection of molten droplets from the target leads to particulate laden films, which is undesirable in heterostructure growth. To overcome these issues, a dual-laser ablation (PLDDL) process that combines an excimer (KrF) laser and CO2 laser pulses was used to grow epitaxial PZT films on SrTiO3 (100) and MgO (100) substrates. Intensified-charge-coupled-detector (ICCD) images and optical emission spectroscopy of the laser-ablated plumes in PLDDL revealed a broader angular expansion and enhanced excitation of the ablated species as compared to those for single-laser ablation (PLDSL). This led to the growth of particulate-free PZT films with higher Pb content, better crystallinity, and lower surface roughness as compared to those deposited using PLDSL. For FE measurements, PZT capacitors were fabricated in situ using the latticed-matched metallic oxide, La0.7Sr0.3MnO3, as the top and bottom electrodes. PZT films deposited using PLDDL exhibited enhanced polarization for all driving voltages as compared to those deposited using PLDSL. A highest remanent polarization (Pr) of ∼91 μC/cm2 and low coercive field of ∼40 kV/cm was recorded at 9 V driving voltage. Fatigue characterization revealed that PZT films deposited using PLDDL showed unchanging polarization, even after 109 switching cycles.

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Novel technique for low-jitter dual-laser synchronization in a thin film deposition system

Cited by 2 publications

References 15 publications

Evidence for the physical basis and universality of the elimination of particulates using dual-laser ablation. I. Dynamic time-resolved target melt studies, and film growth of Y2O3 and ZnO

Evidence for the physical basis and universality of the elimination of particulates using dual-laser ablation. I. Dynamic time-resolved target melt studies, and film growth of Y2O3 and ZnO

Role of dual-laser ablation in controlling the Pb depletion in epitaxial growth of Pb(Zr0.52Ti0.48)O3 thin films with enhanced surface quality and ferroelectric properties

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