2022
DOI: 10.1109/jphotov.2022.3196822
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Novel Process for Screen-Printed Selective Area Front Polysilicon Contacts for TOPCon Cells Using Laser Oxidation

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Cited by 7 publications
(1 citation statement)
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“…It is known as "etch stop" [31]. Therefore, in the etching recipe, we adjusted the etching bias power and reduced the flow ratio of carbon-based gas, thereby reducing the polymer generation during the etching process and preventing the etching from self-stopping effectively [32].…”
Section: Aprocess Flowmentioning
confidence: 99%
“…It is known as "etch stop" [31]. Therefore, in the etching recipe, we adjusted the etching bias power and reduced the flow ratio of carbon-based gas, thereby reducing the polymer generation during the etching process and preventing the etching from self-stopping effectively [32].…”
Section: Aprocess Flowmentioning
confidence: 99%