2004
DOI: 10.1016/j.physe.2004.06.027
|View full text |Cite
|
Sign up to set email alerts
|

Novel nanostructure architectures

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
7
0
1

Year Published

2005
2005
2016
2016

Publication Types

Select...
5
3

Relationship

1
7

Authors

Journals

citations
Cited by 22 publications
(10 citation statements)
references
References 46 publications
0
7
0
1
Order By: Relevance
“…[113][114][115] In this case, the diameter of the tubes is defined by the layer thicknesses and built in strains. [113] Fabrication of micro-and nanostructures using wafers with an embedded sacrificial layer is attractive due to the versatility, and experimental simplicity of the approach.…”
Section: Top-down Approachesmentioning
confidence: 99%
“…[113][114][115] In this case, the diameter of the tubes is defined by the layer thicknesses and built in strains. [113] Fabrication of micro-and nanostructures using wafers with an embedded sacrificial layer is attractive due to the versatility, and experimental simplicity of the approach.…”
Section: Top-down Approachesmentioning
confidence: 99%
“…Facets and steps appear spontaneously, or strain relief can create a self-organized nanopattern on the metal or semiconductor surface [22,[66][67][68]. The local periodicity of nanostructure and limited surface area of ordered domains are insuperable disadvantages of the method.…”
Section: Introductionmentioning
confidence: 99%
“…[117,118] Nanoröhren und andere ungewöhnliche Strukturen lassen sich auch durch Abscheidung von Schichten aus Ge, GaAs und ähnlichem auf Substraten (z. B. Silicium) mithilfe von Molekularstrahlepitaxie erhalten, [113][114][115] wobei die Durchmesser der Röhren durch die Schichtdicken und die Spannungen bestimmt werden. [113] Die Herstellung von Mikro-und Nanostrukturen auf Wafern mit zusätzlichen Opferschichten ist ein einfaches und vielseitiges Verfahren.…”
Section: "Top-down"-verfahrenunclassified