Novel Method for Thermal Characterization of MEMS

Gao, Huadong; Amann, Johannes; Lyu, Xuemeng; Wöllenstein, Jürgen; Palzer, Stefan

doi:10.1109/jmems.2018.2822874

Cited by 2 publications

(2 citation statements)

References 39 publications

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“…Accurate temperature calibrations of microheaters are a daunting task and recent report by Gao et al has outlined its difficulty [1]. Nevertheless, the temperature accuracy and calibration of MEMS heaters are extremely important.…”

Section: Introductionmentioning

confidence: 99%

Critical analysis of micro-thermogravimetry of CuSO_4·5H₂O crystals using heatable microcantilevers

Tiwary¹,

Zakerin²,

Natálio³

et al. 2019

J. Micromech. Microeng.

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Micro/nano thermogravimetry (TG) employing MEMS has significant potential to improve the minimum sample mass and mass resolution as compared to commercial TG instruments. Although there have been a few previous reports on MEMS TG, none of them have critically analysed the obtained TG curve in detail. In this work, we have designed and fabricated a microelectromechanical thermogravimetric device (MMTG) with integrated microheaters and temperature sensors. The mass sensitivity of the device was estimated to be 0.89 pg Hz −1 which outperforms the standard TG approaches. We tested the MMTG performance with CuSO 4 •5H 2 O crystals. The final mass loss ratio corresponds to the theoretically expected value, although the obtained TG curve deviated from the standard TG curve of CuSO 4 •5H 2 O obtained from commercial TG instruments. We attributed the deviation to the inherent temperature non-uniformity, non-isothermal conditions and temperature gradients of metallicwire based microheaters. Finite element (FE) simulations were carried out in order to confirm and gain insights into the non-uniform heating phenomena of microheater and sample. Based on the simulation results, we propose designs that can be realized to make MEMS TG a successful enterprise.

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Section: Introductionmentioning

confidence: 99%

Critical analysis of micro-thermogravimetry of CuSO_4·5H₂O crystals using heatable microcantilevers

Tiwary¹,

Zakerin²,

Natálio³

et al. 2019

J. Micromech. Microeng.

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“…Using the inkjet printing technology offers a way to bridge the gap between nanoscience and MEMS and integrate hybrid nanomaterials in a flexible, reproducible fashion. Thermal control and electronic read-out of the final functional layer is achieved using a micromachined, lowpower consuming suspended hotplate device featuring a heating structure and two interdigitated electrode structures [34], [35]. Using this simple device in combination with a temperature modulation scheme different odor scenarios are classified.…”

Section: Introductionmentioning

confidence: 99%

Inkjet-printed, functional heterolayers of ZnO@CuO for stoma pouch monitoring

et al. 2018

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Many bowel cancer patients are in need of an artificial stoma as part of their surgical treatment, and associated post-surgical odors caused by leaking stoma pouches may lead to social isolation, which is why inconspicuous monitoring of this situation is important for affected persons. The integration of micro-and nanotechnology may offer low-cost, low-power consuming and small solutions to this challenge. To this end, we present an inkjet-printed, heterostructured gas sensor that has been built by incorporating nanosized p-type semiconducting CuO in a porous n-type ZnO matrix. The functional layer is fabricated using a combination of a colloidal suspension and sol-gel approach optimized for inkjet printing thus offering an industry-ready method for integration of nanomaterials in microelectromechanical systems (MEMS) structures. Using a thermal modulation scheme we enhance the information content and classify different events. We demonstrate that a simple MEMS device using a novel hetero-nanomaterial may be used to reliably identify situations where stoma pouch content escapes.

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Novel Method for Thermal Characterization of MEMS

Cited by 2 publications

References 39 publications

Critical analysis of micro-thermogravimetry of CuSO_4·5H₂O crystals using heatable microcantilevers

Critical analysis of micro-thermogravimetry of CuSO_4·5H₂O crystals using heatable microcantilevers

Inkjet-printed, functional heterolayers of ZnO@CuO for stoma pouch monitoring

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Novel Method for Thermal Characterization of MEMS

Cited by 2 publications

References 39 publications

Critical analysis of micro-thermogravimetry of CuSO4·5H2O crystals using heatable microcantilevers

Critical analysis of micro-thermogravimetry of CuSO4·5H2O crystals using heatable microcantilevers

Inkjet-printed, functional heterolayers of ZnO@CuO for stoma pouch monitoring

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Critical analysis of micro-thermogravimetry of CuSO_4·5H₂O crystals using heatable microcantilevers

Critical analysis of micro-thermogravimetry of CuSO_4·5H₂O crystals using heatable microcantilevers