Abstract:Micro/nano thermogravimetry (TG) employing MEMS has significant potential to improve the minimum sample mass and mass resolution as compared to commercial TG instruments. Although there have been a few previous reports on MEMS TG, none of them have critically analysed the obtained TG curve in detail. In this work, we have designed and fabricated a microelectromechanical thermogravimetric device (MMTG) with integrated microheaters and temperature sensors. The mass sensitivity of the device was estimated to be 0… Show more
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