Novel membrane-less two-way MEMS loudspeaker based on piezoelectric dual-concentric actuators

Stoppel, F.; Eisermann, C.; Gu-Stoppel, Shanshan; Kaden, D.; Giese, Thorsten; Wagner, Bernhard

doi:10.1109/transducers.2017.7994475

Cited by 30 publications

(17 citation statements)

References 3 publications

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“…The widely used piezoelectric materials include lead zirconate titanate (PZT) or organic polymers such as polyvinylidene fluoride (PVDF) due to their excellent piezoelectric coefficient and relative mature manufacture processes. The superb features of the traditional (PZT) piezoelectric speakers are their high SPL, and high sensitivity [9] [10]. However, these speakers are incompatible with semiconductor batch fabrication and manufactured with difficult assembly steps.…”

Section: Introductionmentioning

confidence: 99%

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

Fawzy

2022

JES. Journal of Engineering Sciences

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This paper reports piezoelectric aluminium nitride (AlN) based microelectromechanical systems (MEMS) speakers. We introduce a novel geometry of micro speakers based on AlN to meet the requirements of modern applications such as phones, tablets, laptops, and in-ear applications. We introduce the principle, design, and characterization results. The speakers were fabricated on cavity silicon on insulator (SOI) substrate and characterized by using an electroacoustic tester. This paper considers the acoustic performance of the speakers. The results show that the speakers gave us a high sound pressure level (SPL) of more than 78 dB for circle geometry when applying 2 volts on the electrodes. These results are equal for PZT MEMS speakers moreover AlN opens the door to integrate the speakers and the ASIC on the same chip. The size of the different geometries' speakers isn't exceeded 3mm × 3mm. These geometries offer a breakthrough in acoustic performance, a frequency response, and low power consumption

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Section: Introductionmentioning

confidence: 99%

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

Fawzy

2022

JES. Journal of Engineering Sciences

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“…Both finite element analysis (FEA) and lumped element modelling (LEM) are typically employed to study the effects of various design parameters and to optimize the overall performance of MEMS speakers [ 19 , 20 ]. Several approaches in terms of material selection [ 12 ], special structural design [ 21 , 22 ], and electrode configuration [ 23 , 24 ] have also been demonstrated to achieve the better acoustic performance of MEMS speakers. Extensive research efforts have been devoted to developing better MEMS speakers with promising results demonstrated, which is evidenced by a large amount of literature produced.…”

Section: Introductionmentioning

confidence: 99%

Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing extensive attention for potential applications in hearing instruments, portable electronics, and the Internet of Things (IoT). MEMS speakers based on different transduction mechanisms, including piezoelectric, electrodynamic, electrostatic, and thermoacoustic actuation, have been developed and significant progresses have been made in commercialization in the last few years. In this article, the principle and modeling of each MEMS speaker type is briefly introduced first. Then, the development of MEMS speakers is reviewed with key specifications of state-of-the-art MEMS speakers summarized. The advantages and challenges of all four types of MEMS speakers are compared and discussed. New approaches to improve sound pressure levels (SPLs) of MEMS speakers are also proposed. Finally, the remaining challenges and outlook of MEMS speakers are given.

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“…Moreover, due to certain restrictions, the reproduction range is limited, necessitating even more expensive and bulkier multi-way speaker systems. Piezoelectric MEMS transducers have a lot of advantages like easy to fabricate, workable over a large dynamic range, and free from the polarization voltage requirement [1][2][3][4]. While the tensile residual stress in the transducer diaphragm is the main problem in these transducers.…”

Section: Introductionmentioning

confidence: 99%

“…MEMS loudspeakers are widely used in smartphones, in-ear applications, head phones, or other consumer goods [1][2][3][4][5] In recent years, lead zirconium titanate (PZT) piezoelectric micro speakers are dominant on the research trend. Aluminium nitride (AlN) can be another way where AlN has ≈10× lower transmitting efficiency compared with PZT [6,7].…”

Section: Introductionmentioning

confidence: 99%