Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film

Fawzy, Ahmed; Lang, Yiming; Zhang, Menglun

doi:10.1049/mna2.12035

Cited by 8 publications

(5 citation statements)

References 14 publications

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“…For these reasons, AlN, despite featuring a lower piezoelectric coefficient, is of particular interest: its thin film deposition process is, indeed, quite mature and fully compatible with CMOS processes. Many MEMS speakers employing standard AlN were proposed [35,36,59]; moreover, scandium doping was employed as well in order to increase the piezoelectric coefficient of regular AlN [51].…”

Section: Mems Speakers State-of-the-artmentioning

confidence: 99%

“…MEMS speakers are extensively adopted in hearing aids to provide sound amplification for people with hearing loss [34][35][36][37][38]40,41,[46][47][48][49] or even as part of a fully implantable cochlea [50]. In headphones [34,36,38,43,46,51] and earbuds [35,36,39,40,44,52], they are employed to provide high-fidelity and low distortion audio playback, whereas in the medical field, they are used for health warning applications [44]. Moreover, MEMS audio actuators could be employed in acoustic fluidics applications in order to enable matter manipulation in the miniaturization domain, e.g., in lab-on-chip solutions, nanoparticle patterning, or single cell studies [53,54].…”

Section: Introductionmentioning

confidence: 99%

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Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

et al. 2023

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In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety of highly topical applications (consumer devices, medical equipment, automotive systems, and many more). This review, besides analyzing the main integrated sound transduction principles typically exploited, surveys the current State-of-the-Art scenario, presenting the recent performance advances and trends of MEMS microphones and speakers. In addition, the interface Integrated Circuits (ICs) needed to properly read the sensed signals or, on the other hand, to drive the actuation structures are addressed with the aim of offering a complete overview of the currently adopted solutions.

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Section: Mems Speakers State-of-the-artmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

et al. 2023

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“…However, from a commercial perspective, only a handful of AlN MEMS speakers are currently available on the market [86]. Fawzy et al [87] developed a 9% Sc-doped AlN-based MEMS speaker and compared its piezoelectric coefficient to that of AlN. The design consists of four triangular actuators arranged in a stacked position.…”

Section: ) Ain-based Speakersmentioning

confidence: 99%

A Review of the Recent Applications of Aluminum Nitride-Based Piezoelectric Devices

et al. 2023

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Piezoelectric materials have attracted considerable attention over the last two decades because many technologies utilize their core properties of piezoelectric materials. Previous applications consisted of bulk structures; however, a shift towards better performance and a more simplified and compatible fabrication method are required. Aluminum nitride (AlN) is a material that fits these criteria; it has a non-centrosymmetric crystal structure with a polarized c-axis and exhibits piezoelectric properties. Furthermore, it has an added benefit as the fabrication process of AIN is compatible with complementary metal-oxide semiconductor technology. This has led to a rapid increase in the adoption and interest in AlNbased devices. In this review, the crystal structure of AlN and its piezoelectric properties are compared with those of aluminum scandium nitride. Subsequently, functional devices such as consumer-based devices, telecommunication-based devices, industrial-related applications, and medical applications are presented. Finally, a summary and discussion of the future AlN research are presented.

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“…For example, some piezo-MEMS speakers use piezoelectrically actuated cantilevers attached to a suspended diaphragm to obtain sufficient SPL from its oscillations [7]. A recent publication discusses use of four triangular cantilever structures, closely spaced to each other, such that the effective diaphragm area is sufficient to produce audible sound [8]. The gap between these cantilevers is acoustically transparent.…”

Section: Fabrication At the Mems Scalementioning

confidence: 99%

MEMS audio speakers ^*

Garud,

Pratap

2023

J. Micromech. Microeng.

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Miniaturization of electro-mechanical sensors and actuators has benefited from an advancement in CMOS technology over the years. However, miniaturization of audio speakers has seen considerable development only in the recent times. This paper reviews the developments in MEMS audio speaker research and the initial commercial products available in the market. At first glance, it appears that the relatively slow development of MEMS speakers can be attributed to the fact that the principle of actuation has remained unchanged for several decades. Unfortunately, the physics behind audible sound production holds us back from exclusively adopting miniaturized speakers — sound pressure level is directly proportional to the area of the sound radiating surface. Nevertheless, researchers are continuing to explore new avenues for designing and developing MEMS speakers, without limiting themselves to the existing actuation principles. With newly discovered materials and improving technology, the research in MEMS speakers is gaining attention and new products are emerging. A speaker design based on piezoelectric actuation or electrostatics actuation is favourable at MEMS scale. Indian research community is also contributing to advances in MEMS speakers and near-ultrasonic devices. This paper reviews the development in MEMS audio speakers in India and in the world. The tabulated review findings aim to offer readers an overview of the development of micro-speakers and to provide guidance for designing new micro-speakers.

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Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film

Abstract: This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.

Cited by 8 publications

References 14 publications

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

A Review of the Recent Applications of Aluminum Nitride-Based Piezoelectric Devices

MEMS audio speakers ^*

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Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film

Abstract: This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.

Cited by 8 publications

References 14 publications

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

A Review of the Recent Applications of Aluminum Nitride-Based Piezoelectric Devices

MEMS audio speakers *

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Product

Resources

About

MEMS audio speakers ^*