Novel hydrofluorocarbon polymers for use as pellicles in 157 nm semiconductor photolithography: fundamentals of transparency

French, Roger H.; Wheland, Robert C.; Qiu, Weiming; Lemon, M. F.; Zhang, Edward; Gordon, Joseph S.; Петров, В. А.; Cherstkov, Victor F.; Delaygina, Nina I

doi:10.1016/s0022-1139(03)00081-2

Cited by 54 publications

(51 citation statements)

References 10 publications

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“…We also expected that these substrates would have higher shear adhesion in air and in water than previous results on PTFE because of the reduction of roughness in this study [19][20][21][22][23]. Our second hypothesis was that shear adhesion will vary based on the degree of fluorination, where a fully fluorinated substrate ( perfluorinated, such as fluorinated ethylene propylene (FEP)) will have lower shear adhesion values in air and in water than a partially fluorinated substrate (such as ethylene tetrafluoroethylene (ETFE)) [24,25]. Likewise, we hypothesized that our control, non-fluorinated substrate, will have no difference in shear adhesion in water and in air, corresponding to our previous results on hydrophobic, non-fluorinated substrates.…”

Section: Introductionmentioning

confidence: 70%

Adhesive interactions of geckos with wet and dry fluoropolymer substrates

Stark

Dryden

Olderman

et al. 2015

J. R. Soc. Interface.

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Fluorinated substrates like Teflon w (poly(tetrafluoroethylene); PTFE) are well known for their role in creating non-stick surfaces. We showed previously that even geckos, which can stick to most surfaces under a wide variety of conditions, slip on PTFE. Surprisingly, however, geckos can stick reasonably well to PTFE if it is wet. In an effort to explain this effect, we have turned our attention to the role of substrate surface energy and roughness when shear adhesion occurs in media other than air. In this study, we removed the roughness component inherent to commercially available PTFE and tested geckos on relatively smooth wet and dry fluoropolymer substrates. We found that roughness had very little effect on shear adhesion in air or in water and that the level of fluorination was most important for shear adhesion, particularly in air. Surface energy calculations of the two fluorinated substrates and one control substrate using the Tabor-Winterton approximation and the Young-Dupré equation were used to determine the interfacial energy of the substrates. Using these interfacial energies we estimated the ratio of wet and dry normal adhesion for geckos clinging to the three substrates. Consistent with the results for rough PTFE, our predictions show a qualitative trend in shear adhesion based on fluorination, and the quantitative experimental differences highlight the unusually low shear adhesion of geckos on dry smooth fluorinated substrates, which is not captured by surface energy calculations. Our work has implications for bioinspired design of synthetics that can preferentially stick in water but not in air.

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Section: Introductionmentioning

confidence: 70%

Adhesive interactions of geckos with wet and dry fluoropolymer substrates

Stark

Dryden

Olderman

et al. 2015

J. R. Soc. Interface.

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“…Experiments exposing the two polymers to only VUV radiation have also been performed and it was observed that the amount of crosslinking in the homopolymer was approximately 5 to 30 times lower than the copolymer suggesting much greater energy absorption and radiation chemistry in the latter. PVDF, with its highly alternating backbone which minimizes electronic delocalization [76], is commonly used in terrestrial applications due to its high transparency to UV-vis radiation [77]. P(VDF-TrFE), conversely, has shorter run lengths of alternating CH 2 -CF 2 due to the randomly distributed CHF groups which may lower the transparency.…”

Section: Equation (6)mentioning

confidence: 99%

“…P(VDF-TrFE), conversely, has shorter run lengths of alternating CH 2 -CF 2 due to the randomly distributed CHF groups which may lower the transparency. French et al have documented the importance of alternation on transparency of fluoropolymers to VUV radiation [76]. The assumption that P(VDF-TrFE) absorbs more strongly in the VUV range than PVDF has yet to be validated experimentally due to the instrumental difficulties in measuring the VUV spectra in the range 115 -200 nm of semi-crystalline materials.…”

Section: Equation (6)mentioning

confidence: 99%

Characterization, performance and optimization of PVDF as a piezoelectric film for advanced space mirror concepts.

Jones¹,

Assink²,

Dargaville³

et al. 2005

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Piezoelectric polymers based on polyvinylidene fluoride (PVDF) are of interest for large aperture spacebased telescopes as adaptive or smart materials. Dimensional adjustments of adaptive polymer films depend on controlled charge deposition. Predicting their long-term performance requires a detailed understanding of the piezoelectric material features, expected to suffer due to space environmental degradation. Hence, the degradation and performance of PVDF and its copolymers under various stress environments expected in low Earth orbit has been reviewed and investigated. Various experiments were conducted to expose these polymers to elevated temperature, vacuum UV, γ-radiation and atomic oxygen. The resulting degradative processes were evaluated. The overall materials performance is governed by a combination of chemical and physical degradation processes. Molecular changes are primarily induced via radiative damage, and physical damage from temperature and atomic oxygen exposure is evident as depoling, loss of orientation and surface erosion. The effects of combined vacuum UV radiation and atomic oxygen resulted in expected surface erosion and pitting rates that determine the lifetime of thin films. Interestingly, the piezo responsiveness in the underlying bulk material remained largely unchanged. This study has delivered a comprehensive framework for material properties and degradation sensitivities with variations in individual polymer performances clearly apparent. The results provide guidance for material selection, qualification, optimization strategies, feedback for manufacturing and processing, or alternative materials. Further material qualification should be conducted via experiments under actual space conditions. 3 4 AcknowledgementsThe authors express their appreciation to Bruce Tuttle for use of equipment to measure the d 33 coefficients, Jonathan Campbell for use of the evaporation chamber, Mark Stavig for DMA measurements, Gary Zender for acquiring the SEM images, Ralph

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“…This polymer, synthesized from perfluoro-4-vinyloxy-1-butene via radical polymerization reaction, has high optical transparency, low autofluorescence in the visible and near-UV regions (absorption edge is approximately 170 nm) [23] and a very low refractive index [24], and hence, it is used as polymer optical fibers and antireflection films in display panels [25]. In addition, such excellent optical properties make the amorphous perfluorocarbon an attractive material for biodevices especially for bioimaging or optical biosensing applications [26][27][28][29][30].…”

Section: Experimental Methodsmentioning

confidence: 99%

Optical Observation of Deep Bulk Damage in Amorphous Perfluorocarbon Films Produced by UV Photons Emitted from Low-Pressure Argon Plasma

Ono

Iizuka

Akagı

et al. 2014

J. Photopol. Sci. Technol.

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In plasma processing, UV photons generate damage deep in the bulk of transparent materials such as amorphous polymers and glass. In this article, we propose the use of total internal reflection fluorescence microscopy for the nondestructive and highly sensitive detection of UV-induced deep bulk damage and for the first time demonstrate the three-dimensional profiling of UV penetration and optical damage production inside amorphous perfluorocarbon films. Weak fluorescence from damaged molecules, whose original chemical structure was altered through bond breaking and reconstruction, was detected up to several hundred nanometers below the surface after exposure to argon plasma.

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Novel hydrofluorocarbon polymers for use as pellicles in 157 nm semiconductor photolithography: fundamentals of transparency

Cited by 54 publications

References 10 publications

Adhesive interactions of geckos with wet and dry fluoropolymer substrates

Adhesive interactions of geckos with wet and dry fluoropolymer substrates

Characterization, performance and optimization of PVDF as a piezoelectric film for advanced space mirror concepts.

Optical Observation of Deep Bulk Damage in Amorphous Perfluorocarbon Films Produced by UV Photons Emitted from Low-Pressure Argon Plasma

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