High speed metal-based optical scanning Notwithstanding these advantages, stainless steel devices were successfully fabricated in combination with substrates would be very difficult to integrate with piezoelectric thick films directly deposited by the aerosol piezoelectric thick ceramic materials. It is not easy to deposition method (ADM) and specially designed microfabricate piezoelectric ceramic materials smaller stainless steel frame. A large optical scanning angle (41°) than 1 mm2 on stainless steel substrates using glue was achieved at a high resonance frequency (28.24 kHz) processes or to directly fabricate piezoelectric ceramic in ambient air without vacuum packaging. The well-thick films on metal substrates by conventional sputtering polished metal-based mirror has good flatness of less techniques that require processing temperatures above than 105 nm, which is lower than 2/4. Sepcially, we 600°C. carried out in the range from -20WC to 80WC at Recently, Akedo et al. have reported that environmental chamber to investigate temperature piezoelectric PZT thick films directly deposited on properties of metal-based optical scanner. The scanning stainless steel substrates using the aerosol deposition angle is linearly increased with increase of temperature, method (ADM) could acquire desirable ferroelectric while the resonant frequency is linearly decreased as properties upon post-annealing below 600°C [3,4]. ADM temperature increased. Also, we compared with has become very attractive for deposition of performance of metal-based optical scanner driven by piezoceramics thick films at room temperature on several bulk PZT and AD-PZT thick films.kinds of substrates, including silicon, plastics and metals. Our group has studied several MEMS devices including a