Novel high resolution optical scanner actuated by aerosol deposited PZT films

Asai, Nobuaki; Matsuda, R.; Watanabe, Masanao; Takayama, H.; Shoji, Yuya; Mase, A.; Shikida, M.; Sato, Kaoru; Lebedev, Maxim; Akedo, Jun

doi:10.1109/memsys.2003.1189732

Cited by 21 publications

(35 citation statements)

References 4 publications

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“…PZT-driven Si-based scanner with four hinges [2] and Lamb wave resonated optical microscanner [5,6] in order High-speed resonance optical scanners have many to construct a practical optical microscanner. applications in laser displays, laser printers, and the key In the present study, we demonstrate fabrication of components of various sensors.…”

Section: Introductionmentioning

confidence: 99%

“…applications in laser displays, laser printers, and the key In the present study, we demonstrate fabrication of components of various sensors. The application to high speed metal-based optical scanning in combination display devices required high performance horizontal with piezoelectric thick films directly deposited by the scanners with high frequencies, large scan angles of over aerosol deposition method (ADM) and specially designed 20°and large mirror sizes for high display quality [1,2]. stainless steel frame.…”

Section: Introductionmentioning

confidence: 99%

“…An optical mirror was laser beam exhibited no beam distortion. The quality attached using two narrow hinges (torsional bars), one factor of the metal-based scanner was estimated to be 330. from either side, at the center of the mirror (symmetrical This is lower than that of a Si-MEMS scanner (600) [2]. mirror structure).…”

Section: Introductionmentioning

confidence: 99%

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Temperature Properties of PZT Actuated High-Speed Metal-Based Optical Resonant Scanners

Park¹,

Park²,

Akedo³

2007

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

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High speed metal-based optical scanning Notwithstanding these advantages, stainless steel devices were successfully fabricated in combination with substrates would be very difficult to integrate with piezoelectric thick films directly deposited by the aerosol piezoelectric thick ceramic materials. It is not easy to deposition method (ADM) and specially designed microfabricate piezoelectric ceramic materials smaller stainless steel frame. A large optical scanning angle (41°) than 1 mm2 on stainless steel substrates using glue was achieved at a high resonance frequency (28.24 kHz) processes or to directly fabricate piezoelectric ceramic in ambient air without vacuum packaging. The well-thick films on metal substrates by conventional sputtering polished metal-based mirror has good flatness of less techniques that require processing temperatures above than 105 nm, which is lower than 2/4. Sepcially, we 600°C. carried out in the range from -20WC to 80WC at Recently, Akedo et al. have reported that environmental chamber to investigate temperature piezoelectric PZT thick films directly deposited on properties of metal-based optical scanner. The scanning stainless steel substrates using the aerosol deposition angle is linearly increased with increase of temperature, method (ADM) could acquire desirable ferroelectric while the resonant frequency is linearly decreased as properties upon post-annealing below 600°C [3,4]. ADM temperature increased. Also, we compared with has become very attractive for deposition of performance of metal-based optical scanner driven by piezoceramics thick films at room temperature on several bulk PZT and AD-PZT thick films.kinds of substrates, including silicon, plastics and metals. Our group has studied several MEMS devices including a

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Temperature Properties of PZT Actuated High-Speed Metal-Based Optical Resonant Scanners

Park¹,

Park²,

Akedo³

2007

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

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“…In such displays, microelectromechanical systems (MEMS) scanner mirrors are key components, because they determine the specifications of the display such as projection size and resolution (Urey 2002). A two-axis MEMS scanner mirror is scanned both horizontally and vertically by microactuators of electrostatic (Schenk et al 2000(Schenk et al , 2001, electromagnetic (Yalcinkaya et al 2006;Miyajima et al 2001), and piezoelectric (Filhol et al 2005;Tani et al 2006;Yamada and Kuriyama 1998;Asai et al 2003) systems. Among these systems, the piezoelectric microactuator system is advantageous because it enables low voltage actuation, low power consumption, and large operating force (Tani et al 2007;Iseki et al 2010;Pan et al 2010;Koh et al 2010;Kobayashi et al 2005;Yasuda et al 2005).…”

Section: Introductionmentioning

confidence: 99%

Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

et al. 2012

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We have developed a titanium (Ti)-based piezoelectric microelectromechanical systems scanner driven by a Pb(Zr, Ti)O 3 (PZT) thin film for the development of laser scanning displays. The 2-lm-thick PZT thin film was directly deposited on a 50-lm-thick Ti substrate by radio frequency magnetron sputtering. Prior to PZT deposition, the Ti substrate was microfabricated into the shape of a horizontal scanner by wet etching; therefore, we could fabricate a piezoelectric microactuator without using the photolithography process. We confirmed the growth of the polycrystalline PZT film with perovskite structures on the Ti substrate. We achieved an optical scanning angle of 22°at a resonant frequency of 25.4 kHz using a driving voltage of 20 V pp . These horizontal scanning properties can be applicable for laser displays.

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“…Our group has studied several MEMS devices, including a PZTdriven, Si-based scanner with four hinges [2] and a Lamb wave resonated optical microscanner driven by an aerosoldeposited PZT film (AD-PZT film) [9], [10].…”

mentioning

confidence: 99%

Fabrication and scanning-angle temperature dependence of metal-based, optical resonant scanners with PZT actuation

Park

Akedo

2008

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Metal-based, optical scanning devices with a large mirror size of 1 mm(2) and a wide scanning angle of over 90 degrees were fabricated. A high optical scanning angle (90 degrees ) was achieved at a resonance frequency of 7.33 kHz and a driving voltage of 80 V (peak-to-peak) in ambient air without vacuum packaging. We compared the performance of metal-based, optical scanners driven by PZT bulk ceramic and aerosol-deposited PZT thick films over the temperature range from -20 degrees C to 80 degrees C in an environmental chamber.

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Novel high resolution optical scanner actuated by aerosol deposited PZT films

Cited by 21 publications

References 4 publications

Temperature Properties of PZT Actuated High-Speed Metal-Based Optical Resonant Scanners

Temperature Properties of PZT Actuated High-Speed Metal-Based Optical Resonant Scanners

Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

Fabrication and scanning-angle temperature dependence of metal-based, optical resonant scanners with PZT actuation

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