Novel full range vacuum pressure sensing technique using free decay of trapezoid micro-cantilever beam deflected by electrostatic force

Wang, Yuting; Hu, Tien-Chen; Tong, Chi-Jia; Lin, Ming-Tzer

doi:10.1007/s00542-012-1468-2

Cited by 9 publications

(4 citation statements)

References 6 publications

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“…Sample dimensions were as follows: frame (20 mm × 20 mm), paddle plate (5 mm × 5 mm), and length of tapered beam (3 mm) varying in width (3.3 mm wide at the root narrowing to 1.5 mm where it connects to the paddle plate), as shown in Figure 1 b. According to [ 7 , 12 , 16 , 17 , 18 , 19 ], standard etching techniques and Si IC prototyping were used to fabricate crystalline silicon with highly conductive properties. Figure 2 presents a cross-section of the chip with measurements of the constituent parts.…”

Section: Methods and Experimental Designmentioning

confidence: 99%

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

et al. 2021

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Al thin film is extensively used in micro-electromechanical systems (MEMS) and electronic interconnections; however, most previous research has concentrated on their quasi-static properties and applied their designs on larger scales. The present study designed a paddle-like cantilever specimen with metal films deposited on the upper surface to investigate the quasi-static properties of Al thin film at room temperature under high vacuum conditions at microscopic scales. Energy loss was determined using a decay technique in the oscillation amplitude of a vibrating structure following resonant excitation. Grain size and film thickness size were strictly controlled considering the quasi-static properties of the films. This study found that the internal friction of ultra-thin and thin Al films was more dependent on the grain boundaries than film thickness.

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Section: Methods and Experimental Designmentioning

confidence: 99%

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

et al. 2021

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“…Each wafer consists of 9 test chips after fabrication. The detail of the fabrication process sequence can be found in the literature [5,6]. The structure can be metallized from both sides.…”

Section: A Sample Design and Fabricationmentioning

confidence: 99%

Recent Development of Using Optical Methods to Measure the Mechanical Properties of Thin Films

Tong

Lin

Wu³

et al. 2014

2014 International Symposium on Optomechatronic Technologies

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The mechanical properties of micron and nanometer scale thin films have become an important issues in modern microelectronics. Here, two recent development of using optical methods to measure the mechanical properties of thin films were introduced. First, a paddle-like cantilever beam test structure with nanometer scale metal films on top was design and developed. Film strain and stresses of different thicknesses were measured through the beam deflection obtained by using a fourstep phase-shifting process with a Michelson interferometer. Second, we introduce the XRD measurements of the bulge tested thin film. We annealed thin Ag films and tracked the texture transformation in-situ using synchrotron x-ray diffraction while independently varying the stress in the film using a bulge test apparatus. The bulge height was measured as a function of pressure using a simple Fabry-Perot optical interferometer, using the bulge as the fully reflective surface, and an optically flat halfsilvered mirror as a reference surface. A CCD camera was used to record interference fringe motion as the pressure was increased. The bulge height was obtained by counting the number of fringes that passed a given point. A laser light source with a 532 nm wavelength gave a height resolution of 266 nm.

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“…Electrostatic cantilevers have been very popular due to their low-power requirements, small dimensions, and ease of fabrication. They have been used as a pressure sensor [ 1 , 2 ], as a microwave switch [ 3 , 4 , 5 , 6 ], as an air flow sensor [ 7 , 8 , 9 ], as an inkjet head [ 10 , 11 , 12 ], as chemical and biological sensors [ 13 , 14 , 15 ], and as an energy harvester for Microelectromechanical System (MEMS) devices [ 16 , 17 , 18 ].…”

Section: Introductionmentioning

confidence: 99%

A New Analytical Model to Estimate the Voltage Value and Position of the Pull-In Limit of a MEMS Cantilever

Yıldız

2016

Micromachines

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In this study, a new analytical model is developed for an electrostatic Microelectromechanical System (MEMS) cantilever actuator to establish a relation between the displacement of its tip and the applied voltage. The proposed model defines the micro-cantilever as a rigid beam supported by a hinge at the fixed-end with a spring point force balancing the structure. The approach of the model is based on calculation of the electrostatic pressure centroid on the cantilever beam to localize the equivalent electrostatic point load. Principle outcome of the model is just one formula valid for all displacements ranging from the initial to the pull-in limit position. Our model also shows that the pull-in limit position of a cantilever is approximately 44% of the initial gap. This result agrees well with both simulation results and experimental measurements reported previously. The formula has been validated by comparing the results with former empirical studies. For displacements close to the pull-in limit, the percentage errors of the formula are within 1% when compared with real measurements carried out by previous studies. The formula also gives close results (less than 4%) when compared to simulation outcomes obtained by finite element analysis. In addition, the proposed formula measures up to numerical solutions obtained from several distributed models which demand recursive solutions in structural and electrostatic domains.

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Novel full range vacuum pressure sensing technique using free decay of trapezoid micro-cantilever beam deflected by electrostatic force

Cited by 9 publications

References 6 publications

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

Recent Development of Using Optical Methods to Measure the Mechanical Properties of Thin Films

A New Analytical Model to Estimate the Voltage Value and Position of the Pull-In Limit of a MEMS Cantilever

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