Novel flexible FBAR on PET substrate

Hu, Ningning; He, Xing; Bian, Xiaolei; Chen, G.H.; Dong, Shurong; Luo, Jikui

doi:10.1109/edssc.2014.7061215

Cited by 3 publications

(3 citation statements)

References 9 publications

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“…LCP also has better electromechanical properties than other flexible materials. PET films have excellent impact strength, thermal stability, and good bending properties, making them suitable for use as a flexible substrate [93]. PI has a variety of excellent properties, including excellent thermal stability, a low dielectric constant, good mechanical properties, low moisture absorption, chemical stability, and solvent resistance [94,95].…”

Section: Methodsmentioning

confidence: 99%

A review of research on RF MEMS for metaverse interactions

Nan,

Jia,

et al. 2024

J. Micromech. Microeng.

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Metaverse as a comprehensive integration of multiple digital technologies of the new generation, enables human beings to bring unprecedented immersive experiences with the support of virtual reality, augmented reality, blockchain, digital twin, Artificial Intelligence, haptic IoT, and human-computer interaction. In view of the urgent need for high-speed and high-capacity data transmission as well as high integration, RF MEMS devices have become the core components for metaverse system building due to their advantages of miniaturization, high integration, and low power consumption. Playing a pivotal role in real-time high-capacity data transmission and signal processing in metaverse interactive systems, the low cost and high performance of RF MEMS devices have once again become the focus of attention for people from all walks of life. Therefore, this paper focuses on the working principles and performance optimization of RF MEMS devices. Firstly, the classification and basic principles of RF MEMS devices are introduced, followed by the advanced fabrication technology and optimization scheme of MEMS devices, and then the advanced applications of RF MEMS devices in the field of metaverse are discussed in focus, including IoT mobile communication, Artificial Intelligence, and flexible wearables. Finally, the prospects and potential challenges for the development of RF MEMS devices interacting with the metaverse are summarized and discussed.

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Section: Methodsmentioning

confidence: 99%

A review of research on RF MEMS for metaverse interactions

Nan,

Jia,

et al. 2024

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…PET film is suitable to use as a flexible substrate because of its excellent impact strength, thermal stability and good bending properties [ 116 ]. Moreover, PET film has a relatively high dielectric constant and a low microwave loss tangent, which may lead to size reduction.…”

Section: Materials For Flexible Rf Memsmentioning

confidence: 99%

Recent Advances in Flexible RF MEMS

Shi

Shen

2022

Micromachines

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Microelectromechanical systems (MEMS) that are based on flexible substrates are widely used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches, phase shifters, reconfigurable antennas, phased array antennas and resonators, etc. When attempting to accommodate flexible deformation with the movable structures of MEMS, flexible RF MEMS are far more difficult to structurally design and fabricate than rigid MEMS devices or other types of flexible electronics. In this review, we survey flexible RF MEMS with different functions, their flexible film materials and their fabrication process technologies. In addition, a fabrication process for reconfigurable three-dimensional (3D) RF devices based on mechanically guided assembly is introduced. The review is very helpful to understand the overall advances in flexible RF MEMS, and serves the purpose of providing a reference source for innovative researchers working in this field.

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“…For example, FBAR devices are very promising for sensing and monitoring pressure [2], mass [3], ultraviolet (UV) light [4], and biomolecules [5] owing to their small size, high sensitivity, and low power consumption. Over the past several decades, a number of FBAR studies have focused on the development of novel materials (piezoelectric layer, substrate membrane) for the fabrication of high-performance FBARs [6], and flexible polymer substrates such as polyethylene terephthalate (PET) [7] and polyimide (PI) [8] have been successfully used in the fabrication of flexible FBAR devices. However, commonly used piezoelectric materials for FBAR devices (materials such as zinc oxide (ZnO), aluminum nitride (AlN), and lead zirconate titanate (PZT)) are inorganic, and are either brittle or not biocompatible.…”

Section: Introductionmentioning

confidence: 99%

A Flexible Film Bulk Acoustic Resonator Based on β-Phase Polyvinylidene Fluoride Polymer

Jin

Dong

et al. 2020

Sensors

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This paper reports a novel flexible film bulk acoustic resonator (FBAR) based on β-phase polyvinylidene fluoride (PVDF) piezoelectric polymer. The proposed device was simulated and evaluated; then, a low-temperature photolithography process with a double exposure method was developed to pattern the electrodes for the device, which enabled the device to retain the piezoelectric properties of the β-phase PVDF film. Results showed that the β-phase PVDF FBARs had a resonant frequency round 9.212 MHz with a high electromechanical coupling coefficient (k 2 ) of 12.76% ± 0.56%. The device performed well over a wide bending-strain range up to 2400 µε owing to its excellent flexibility. It showed good stability as a strain sensor with a sensitivity of 80 Hz/µε, and no visible deterioration was observed after cyclic bending tests. The PVDF FBAR also exhibited an exceptionally large temperature coefficient of frequency (TCF) of −4630 ppm/K, two orders of magnitude larger than those of other FBARs based on common inorganic piezoelectric materials, extraordinarily high sensitivity for temperature sensing. All results showed that β-phase PVDF FBARs have the potential to expand the application scope for future flexible electronics.with high-cost equipment for the deposit of these highly crystalline films can limit their widespread application and commercialization.Polyvinylidine difluoride (PVDF), a well-known high-performance piezoelectric polymer, could be a strong candidate as a new flexible FBAR material due to its remarkable inherent flexibility, lightness, and robustness, as well as its high piezoelectric response and low acoustic impedance, similar to those of biological tissue. Since the discovery of the piezoelectric activity of the PVDF material by Kawai in 1969 [9], PVDF-based piezoelectric polymer has been used in a wide range of actuators and sensors, such as underwater acoustic transducers [10], ultrasonic inspection sensors [11], acceleration sensors [12], surface acoustic-wave devices [13], pressure sensors [14], and energy harvesters [15]. In addition, it has been utilized in medical and biological applications such as artificial muscles and organs [16], medical imaging [17], and blood-flow monitors [18]. However, a PVDF polymer cannot be processed by a standard lithography process, limiting its application in MEMS devices and electronics.In this paper, we report on the feasibility of using a β-phase PVDF polymer for the development of FBARs. In this research, an FBAR device was designed with a 100 µm thick β-phase PVDF film sandwiched between two metal electrodes with a simulated resonant frequency of 9.418 MHz. A facile and reliable fabrication method was developed to successfully fabricate β-phase PVDF FBAR, which is compatible with the standard lithography process. The stability of the crystalline phase and the piezoelectricity of the β-phase PVDF film after the fabrication process were verified by X-ray diffraction (XRD) and piezoelectric coefficient d 33 measurement, respectively. The performance of the β...

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Novel flexible FBAR on PET substrate

Cited by 3 publications

References 9 publications

A review of research on RF MEMS for metaverse interactions

A review of research on RF MEMS for metaverse interactions

Recent Advances in Flexible RF MEMS

A Flexible Film Bulk Acoustic Resonator Based on β-Phase Polyvinylidene Fluoride Polymer

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