Recent Advances in Flexible RF MEMS

The miniaturization and low power consumption characteristics of RF MEMS (Radio Frequency Microelectromechanical System) switches provide new possibilities for the development of microsatellites and nanosatellites, which will play an increasingly important role in future space missions. This paper provides a comprehensive review of RF MEMS switches in satellite communication, detailing their working mechanisms, performance optimization strategies, and applications in reconfigurable antennas. It explores various driving mechanisms (electrostatic, piezoelectric, electromagnetic, thermoelectric) and contact mechanisms (capacitive, ohmic), highlighting their advantages, challenges, and advancements. The paper emphasizes strategies to enhance switch reliability and RF performance, including minimizing the impact of shocks, reducing driving voltage, improving contacts, and appropriate packaging. Finally, it discusses the enormous potential of RF MEMS switches in future satellite communications, addressing their technical advantages, challenges, and the necessity for further research to optimize design and manufacturing for broader applications and increased efficiency in space missions. The research findings of this review can serve as a reference for further design and improvement of RF MEMS switches, which are expected to play a more important role in future aerospace communication systems.

Section: Capacitive Rf Mems Switchesmentioning

confidence: 99%

Comprehensive Review of RF MEMS Switches in Satellite Communications

Shao,

Lu,

Xiang

et al. 2024

“…Furthermore, the emergence of new materials, such as piezoelectric polymers and ferroelectric thin films, holds promise for the development of compact and high-performance resonators. These materials exhibit excellent electromechanical properties and can be integrated directly into silicon substrates, enabling the monolithic integration of RF components [16][17][18][19]. Researchers have made significant advancements in the fabrication of Film Bulk Acoustic Resonators (FBARs) using Microelectromechanical Systems (MEMS) technology and compatible Piezoelectric (PZE) materials.…”

Section: Introductionmentioning

confidence: 99%

Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation

Patel,

Adhikari,

Tripathi

et al. 2023

In this paper, the study is supported by design, FEA simulation, and practical RF measurements on fabricated single-port-cavity-based acoustic resonator for gas sensing applications. In the FEA simulation, frequency domain analysis was performed to enhance the performance of the acoustic resonator. The structural and surface morphologies of the deposited ZnO as a piezoelectric layer have been studied using XRD and AFM. The XRD pattern of deposited bulk ZnO film indicates the perfect single crystalline nature of the film with dominant phase (002) at 2θ = 34.58°. The AFM micrograph indicates that deposited piezoelectric film has a very smooth surface and small grain size. In the fabrication process, use of bulk micro machined oxide (SiO2) for the production of a thin membrane as a support layer is adopted. A vector network analyzer (Model MS2028C, Anritsu) was used to measure the radio frequency response of the resonators from 1 GHz to 2.5 GHz. As a result, we have successfully fabricated an acoustic resonator operating at 1.84 GHz with a quality factor Q of 214 and an effective electromechanical coupling coefficient of 10.57%.

“…Despite the obvious advantages of using microelectromechanical systems, a fully reliable and long-lifetime solution has not yet been certified for the space environment. On the other hand, a few examples [4][5][6][7][8] used in signal routing have also been studied in the past years [9][10][11] and, more recently, also for the small satellites domain [12][13][14]. For this reason, the RF MEMS solution is still appealing to substitute semiconductor conventional switches or even bulky waveguide switches with planar, miniaturized, and fully passive devices.…”

Section: Introductionmentioning

confidence: 99%

MEMS-Switched Triangular and U-Shaped Band-Stop Resonators for K-Band Operation

Marcelli,

Sardi,

Proietti

et al. 2023

Triangular resonators re-shaped into Sierpinski geometry and U-shaped resonators were designed, linking them with single-pole-double-through (SPDT) RF MEMS switches to provide frequency tuning for potential applications in the K-Band. Prototypes of band-stop narrowband filters working around 20 GHz and 26 GHz, interesting for RADAR and satellite communications, were studied in a coplanar waveguide (CPW) configuration, and the tuning was obtained by switching between two paths of the devices loaded with different resonators. As a result, dual-band operation or fine-tuning could be obtained depending on the choice of the resonator, acting as a building block. The studied filters belong to the more general group of devices inspired by a metamaterial design.