Novel fabrication technique of TiNi shape memory alloy film using separate Ti and Ni targets

Development of sacrificial layer wet etch process of TiNi for nano-electro-mechanical device application

“…This result is well matched with previous works [9,10]. The smooth peak shape means that sputtered TiNi film has amorphous phase [11].…”

Fatigue behavior of laser-welded NiTi wires in small-strain cyclic bending

“…The abilities to fully recover the original shape after repetitive loading and unloading, by virtue of stress-induced martensitic transformation (SIMT), have made NiTi a favorable material in micro-electromechanical-systems (MEMS) [1][2][3][4]. Particularly, the packaging of MEMS devices is a challenge for the design engineers because a good hermetic sealing without damaging the materials or microelectronics during the joining process is required [2,5].…”

Multiple effects of Ni-rich precipitates in Ni–Ti–Al thin films

“…Cu addition reduces the transformation hysteresis of Ni-Ti SMAs [12]. Besides, some effective heat treatments such as annealing [13][14][15][16] and aging [8,[17][18][19] have been proved to enhance the martensitic transformation temperatures. In Ni 52 Ti 48 alloys, the M s is increased by 12 1C with increasing annealing temperature from 450 to 750 1C [15].…”