Novel fabrication method for surface micromachined thin single-crystal silicon cantilever beams

Gupta, Amit; Denton, J.P.; McNally, Helen; Bashir, Rashid

doi:10.1109/jmems.2003.809974

Cited by 29 publications

(19 citation statements)

References 25 publications

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“…7 shows that for a weaker coupling spring, the sensitivity of the amplitude ratio is increased. The sensitivity of the device has been calculated according to (7) for both values of coupling spring and is shown in Tab. 1.…”

Section: Experiments and Resultsmentioning

confidence: 99%

“…The detection of various biological elements is 10 a widely researched area of resonant mass sensing with functionalised surfaces promoting the attachment of the target analytes. For example, the growth of Escherichia Coli [5] and the adsorption of spores of Bacillus anthracis [6] and Listeria innocua [7] on the surface of a cantilever have been demonstrated previously.…”

Section: Introductionmentioning

confidence: 94%

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Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

Wood

Zhao

et al. 2016

Microelectronic Engineering

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The change in the mass, achieved with focused ion beam (FIB) milling, of one of a pair of electrostatically-coupled microelectromechanical systems (MEMS) resonators has been detected utilising the mode-localisation effect. It has been demonstrated that the shift in the amplitude ratio of the coupled-resonators at the in-phase mode-frequency, in response to a mass change, is five orders of magnitude greater than the equivalent resonant frequency shift of a single resonator device. The device has been fabricated using a silicon-on-insulator (SOI) based process, which allows for high-yield and stiction-free fabrication. In addition, the design of the resonators has been created to have a larger surface area than previously reported designs, in order to facilitate future biological functionalisation. The mass sensitivity has been compared to current state-ofthe-art mode-localised mass sensors and a 5.4 times increase in the amplitude ratio response to a given mass change has been demonstrated for the device in this work.

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Section: Experiments and Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 94%

Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

Wood

Zhao

et al. 2016

Microelectronic Engineering

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“…The substrate curvature technique has long been applied to both complete substrates 1,4,5 and cantilever beams. [6][7][8] Traditionally, mapping of the thermomechanical behavior of a film as a function of composition has been accomplished by measuring the residual stress in the film as a function of temperature, one film at a time. This process is very time consuming if one is interested in measuring properties over a wide range of compositions and temperatures.…”

Section: High-throughput Analysis Of Thin-film Stresses Using Arrays mentioning

confidence: 99%

High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams

Kim

Han

Kaiser

et al. 2008

Review of Scientific Instruments

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We report on a technique for making high-throughput residual stress measurements on thin films by means of micromachined cantilever beams and an array of parallel laser beams. In this technique, the film of interest is deposited onto a silicon substrate with micromachined cantilever beams. The residual stress in the film causes the beams to bend. The curvature of the beams, which is proportional to the residual stress in the film, is measured by scanning an array of parallel laser beams generated with a diffraction grating along the length of the beams. The reflections of the laser beams are captured using a digital camera. A heating stage enables measurement of the residual stress as a function of temperature. As the curvature of each beam is determined by the local stress in the film, the film stress can be mapped across the substrate. This feature makes the technique a useful tool for the combinatorial analysis of phase transformations in thin films, especially when combined with the use of films with lateral composition gradients. As an illustration, we apply the technique to evaluate the thermomechanical behavior of Fe-Pd binary alloys as a function of composition.

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“…9 The process flow involves using merged epitaxial lateral overgrowth (MELO) and chemical mechanical polishing (CMP) of single crystal silicon. MELO can be regarded as an extension of selective epitaxial growth (SEG) and epitaxial lateral overgrowth (ELO).…”

Section: A Cantilever Beam Fabrication and Mechanical Characterizationmentioning

confidence: 99%

Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators

Gupta¹,

Akin²,

Bashir³

2004

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

118

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This article describes a surface micromachined cantilever beam-based resonator for biological sensing applications. The study used a novel microfabrication technique of merged epitaxial lateral overgrowth (MELO) and chemical mechanical polishing (CMP) to fabricate thin, low stress, single-crystal silicon cantilever beams. The vibration spectra of the cantilever beams, excited by thermal and ambient noise, was measured in air using a Dimension 3100 Series scanning probe microscope (SPM), and in certain cases, a Polytec MSV300 laser Doppler vibrometer. The sensors were used to detect the mass of Listeria innocua bacteria by applying increasing concentration of bacteria suspension on the same cantilever beams and measuring the resonant frequency changes in air. Cantilever beams were also used to detect the mass of proteins such as Bovine Serum Albumin (BSA) and antibodies for Listeria that were attached to the cantilever's surfaces by physical adsorption; following which they were used to capture and detect the mass of the bacterial cells on the functionalized cantilever beam surfaces'. The effects of critical point drying of the proteins were evaluated and the results indicate that the functionality of the antibodies was not reduced once rehydrated after critical point drying. The developed biosensor is capable of rapid and ultrasensitive detection of bacteria and promises significant potential for the enhancement of microbiological research and diagnostics.

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Novel fabrication method for surface micromachined thin single-crystal silicon cantilever beams

Cited by 29 publications

References 25 publications

Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams

Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators

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