Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

Abstract

The change in the mass, achieved with focused ion beam (FIB) milling, of one of a pair of electrostatically-coupled microelectromechanical systems (MEMS) resonators has been detected utilising the mode-localisation effect. It has been demonstrated that the shift in the amplitude ratio of the coupled-resonators at the in-phase mode-frequency, in response to a mass change, is five orders of magnitude greater than the equivalent resonant frequency shift of a single resonator device. The device has been fabricated using a silicon-on-insulator (SOI) based process, which allows for high-yield and stiction-free fabrication. In addition, the design of the resonators has been created to have a larger surface area than previously reported designs, in order to facilitate future biological functionalisation. The mass sensitivity has been compared to current state-ofthe-art mode-localised mass sensors and a 5.4 times increase in the amplitude ratio response to a given mass change has been demonstrated for the device in this work.

A Comparative Study of Output Metrics for an MEMS Resonant Sensor Consisting of Three Weakly Coupled Resonators

“…Stiffness change sensing can be applied to inertial, force, displacement and strain sensors; therefore, the presented results can be directly used for the design of such coupled resonator sensors. It is also worth pointing out that for sensing mass changes ( M M), the mass perturbation can be linearly translated to an equivalent stiffness perturbation [16]. Hence it is believed that the results can also be applied for for mass change sensors.…”

Closed-Loop Characterization of Noise and Stability in a Mode-Localized Resonant MEMS Sensor

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Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

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