2018
DOI: 10.1063/1.5026471
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Note: Simultaneous measurement of in-plane and out-of-plane displacement by using orthogonally polarized self-mixing grating interferometer

Abstract: In this paper, we present an orthogonally polarized self-mixing grating interferometer (SMGI) for simultaneous measurement of in-plane and out-of-plane displacements. The measurement ranges in both directions are limited only by the length of grating. The orthogonally polarized lights emitted from a birefringent He–Ne laser are separated and enter the grating at ±1st-order Littrow angles. The diffraction beams re-enter the laser cavity and cause self-mixing interference. To differentiate the orthogonally polar… Show more

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Cited by 4 publications
(3 citation statements)
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“…The maximum nonlinear error of the ΔL f data is 1.8 nm, indicating that its short period resolution is better than 2 nm. The simultaneous measurements of in-plane and out-of-plane displacements are a significant issue to be researched, such as the grating interferometry [51,52], speckle pattern interferometry [53,54], digital image correlation [55,56], and laser Doppler distance sensing [57]. The resolution of the grating interferometer is a few nanometers, and the accuracy can reach a submicron scale.…”
Section: Displacement Sensingmentioning
confidence: 99%
“…The maximum nonlinear error of the ΔL f data is 1.8 nm, indicating that its short period resolution is better than 2 nm. The simultaneous measurements of in-plane and out-of-plane displacements are a significant issue to be researched, such as the grating interferometry [51,52], speckle pattern interferometry [53,54], digital image correlation [55,56], and laser Doppler distance sensing [57]. The resolution of the grating interferometer is a few nanometers, and the accuracy can reach a submicron scale.…”
Section: Displacement Sensingmentioning
confidence: 99%
“…A frequency demodulation circuit, a digital oscilloscope, and a radio-frequency spectrum analyzer are utilized in the signal processing. The simultaneous measurements of in-plane and out-of-plane displacements are a significant issue to be researched, such as the grating interferometry [51,52], speckle pattern interferometry [53,54], digital image correlation [55,56], and laser Doppler distance sensing [57]. The resolution of the grating interferometer is a few nanometers, and the accuracy can reach a submicron scale.…”
Section: Vibration Sensingmentioning
confidence: 99%
“…Liang Lu from Anhui university has been the supporter of fiber lasers [9], [10]. He-Ne lasers have sometimes been utilized [11], much less frequently than other laser types. Kenju Otsuka is a forerunner to introduce SSLs to the field of SMI [12].…”
Section: Introductionmentioning
confidence: 99%