2018
DOI: 10.1063/1.5047210
|View full text |Cite
|
Sign up to set email alerts
|

Note: Plasma optical emission spectroscopy for water vapor quantification and detection during vacuum drying process

Abstract: A methodology involving plasma optical emission spectroscopy driven by a direct current (dc) plasma source is developed to quantify water vapor concentration in a gaseous stream. The experimental setup consists of a dc driven low-pressure plasma cell in which the emission from the plasma discharge is measured by using an optical emission spectrometer. The emission from Hα at 656.2 nm—the first transition in the Balmer series, was found to be the most sensitive to the water vapor concentration in the gas stream… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2019
2019
2024
2024

Publication Types

Select...
2
1
1

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(1 citation statement)
references
References 7 publications
0
1
0
Order By: Relevance
“…This instrument involves a direct current (DC) driven plasma discharge and optical emission spectroscopy (OES) for detecting as well as quantifying water vapor in a flowing gas stream under both trace and high-water vapor loading conditions. For the quantification of water content, a system has been calibrated for gas mixtures of helium and water vapor (Tahiyat, 2018). The OES system is connected to the chamber via a 0.25" (0.635 cm) stainless steel tube and Swagelok connection from one of the 2.75" CF ports on the upper section of the chamber.…”
Section: Optical Emission Spectroscopymentioning
confidence: 99%
“…This instrument involves a direct current (DC) driven plasma discharge and optical emission spectroscopy (OES) for detecting as well as quantifying water vapor in a flowing gas stream under both trace and high-water vapor loading conditions. For the quantification of water content, a system has been calibrated for gas mixtures of helium and water vapor (Tahiyat, 2018). The OES system is connected to the chamber via a 0.25" (0.635 cm) stainless steel tube and Swagelok connection from one of the 2.75" CF ports on the upper section of the chamber.…”
Section: Optical Emission Spectroscopymentioning
confidence: 99%