2003
DOI: 10.1134/1.1545586
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Nonlinear theory of the excitation of azimuthal surface waves during dissipative instability

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Cited by 5 publications
(3 citation statements)
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“…It is obvious that the problem of electron beam-plasma interaction is simplest if a plasma is placed inside a cylindrical metal waveguide with smooth walls and the plasma column is uniform over its length and azimuth [5][6][7][8]. On the other hand, the great interest in the problem of gas discharges sustained on the surface waves is caused by their application in coating by plasma-enhanced chemical vapour deposition and/or etching for microelectronics [9][10][11]. The parameters of such discharges depend on many factors, such as type of electromagnetic surface waves used [3].…”
Section: Introductionmentioning
confidence: 99%
“…It is obvious that the problem of electron beam-plasma interaction is simplest if a plasma is placed inside a cylindrical metal waveguide with smooth walls and the plasma column is uniform over its length and azimuth [5][6][7][8]. On the other hand, the great interest in the problem of gas discharges sustained on the surface waves is caused by their application in coating by plasma-enhanced chemical vapour deposition and/or etching for microelectronics [9][10][11]. The parameters of such discharges depend on many factors, such as type of electromagnetic surface waves used [3].…”
Section: Introductionmentioning
confidence: 99%
“…These waves have been investigated previously [22][23][24][25] in long cylindrical metallic waveguides with circular cross-section. In the limit of waveguides with circular 10 B. Jazi et al…”
Section: 2mentioning
confidence: 98%
“…Such a device could significantly extend the range of possibilities for microwave beam control at high levels of radiated power [21][22][23]. On the other hand, much interest in the problem of gas discharges sustained on surface waves is due to the application of this phenomenon in coating by plasma-enhanced, chemical vapour deposition and/or etching for microelectronics [24][25][26]. Significant attention has been paid to the development of plasma sources and investigations of the properties of the plasma produced in relativistic plasma microwave electronics [27].…”
Section: Introductionmentioning
confidence: 99%