Nondestructive Determination of Pore Size Distribution in Thin Films Deposited on Solid Substrates

Dultsev, F. N.; Baklanov, Mikhaı̈l R.

doi:10.1149/1.1390780

Cited by 65 publications

(33 citation statements)

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“…Initially, EP was used as a method for measuring adsorption isotherms on thin low-k films, where the gravimetric and volumetric methods fail: the quantity of adsorbed fluid is calculated from a change of the refractive index during adsorption. 47,48 Additionally, this method gives the change in the thickness of the thin film during adsorption. Such measurements were proposed as a method for the determination of elastic properties of thin porous films; see Section III C for the detailed discussion.…”

Section: Experimental Measurements Of Adsorption-induced Deformatmentioning

confidence: 99%

Adsorption-induced deformation of nanoporous materials—A review

Gor

Huber

Bernstein

2017

Applied Physics Reviews

214

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When a solid surface accommodates guest molecules, they induce noticeable stresses to the surface and cause its strain. Nanoporous materials have high surface area and, therefore, are very sensitive to this effect called adsorption-induced deformation. In recent years, there has been significant progress in both experimental and theoretical studies of this phenomenon, driven by the development of new materials as well as advanced experimental and modeling techniques. Also, adsorption-induced deformation has been found to manifest in numerous natural and engineering processes, e.g., drying of concrete, water-actuated movement of non-living plant tissues, change of permeation of zeolite membranes, swelling of coal and shale, etc. In this review, we summarize the most recent experimental and theoretical findings on adsorption-induced deformation and present the state-of-the-art picture of thermodynamic and mechanical aspects of this phenomenon. We also reflect on the existing challenges related both to the fundamental understanding of this phenomenon and to selected applications, e.g., in sensing and actuation, and in natural gas recovery and geological CO2 sequestration.

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Section: Experimental Measurements Of Adsorption-induced Deformatmentioning

confidence: 99%

Adsorption-induced deformation of nanoporous materials—A review

Gor

Huber

Bernstein

2017

Applied Physics Reviews

214

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“…A similar technique based on the ellipsometric analysis of the thin films as a function of the relative humidity has been reported for other types of transparent thin films. [26][27][28][29][30] The procedure utilized here is more general and could also be used for thin films prepared by sol-gel ͑e.g., mesoporous films 31 ͒ where the existence of a general procedure for determination of porosity is a clear need.…”

Section: Introductionmentioning

confidence: 99%

Relationship between scaling behavior and porosity of plasma-depositedTiO2thin films

et al. 2007

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The growth of TiO 2 thin films prepared by plasma enhanced chemical vapor deposition has been studied by analyzing their roughness with the concepts of the dynamic scaling theory. Differences in the growth and roughness exponents have been found depending on the composition of the plasma by using either O 2 or mixtures Ar+ O 2 as plasma gas and titanium isopropoxide as the precursor. The slope of the representations of the film roughness against the deposition time yielded values of the exponent ␤ of 0.45 and 0.32 for, respectively, thin films prepared with plasmas of O 2 or mixtures Ar+ O 2 . Meanwhile, values of the exponent ␣ of 1.15 and 1.89/0.35 were deduced from the power spectral density representations for the films prepared under these two experimental conditions. These values are congruent with growth processes dominated, respectively, by shadowing or diffusion processes. A columnar microstructure was observed by scanning electron microscopy for the thin films prepared with pure oxygen. Meanwhile, homogeneous films were obtained with mixtures of Ar+ O 2 . The open porosity of the films was determined by measuring water adsorption-desorption isotherms with a quartz crystal monitor. This analysis showed that in the samples prepared with mixtures of Ar+ O 2 the porosity consisted exclusively of micropores ͑d Ͻ 2 nm͒, while in the films prepared with an oxygen plasma there were micro-and meso-pores ͑d Ͼ 2 nm͒. It is concluded that the different growth mechanisms found by just changing the chemistry of the plasma are responsible for the quite distinct microstructures, porosities, and optical properties obtained for the films.

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“…Ellipsometry allows us to measure both the refractive index and the film thickness d, and therefore the adsorbate volume, which is equal to the open pore volume, can be calculated. Two different theories are used for the pore size distribution (PSD) calculation in mesoporous and microporous films 1 [13,14]. The PSD calculation in the mesoporous films uses the phenomenon of progressive emptying of a porous system initially filled at P = P 0 .…”

Section: Pore Size Distribution (Psd) Calculationsmentioning

confidence: 99%