Noncontact Sub-10 nm Temperature Measurement in Near-Field Laser Heating

Yue, Yanan; Chen, Xiangwen; Wang, Xinwei

doi:10.1021/nn2011442

Cited by 44 publications

(39 citation statements)

References 33 publications

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“…Using the Raman thermometry method, Yue et al (9) studied the temperature rise in a silicon substrate under near-field laser heating. In their experiment (Fig.…”

Section: Near-field Optical Temperature Measurementmentioning

confidence: 99%

“…Nanoscale temperature probing is a good supplement of detecting the hot spot and predicting the thermal performance of these materials (1). In addition, nanoscale thermal mapping is critical for studying thermal response of laser heating effect with nanoscale dimensions, like near-field effect with feature size less than 100 nm (8, 9). The achievement of nanoscale thermal characterization could help with the fast advance in microscopy and manufacturing fields (8, 10).…”

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confidence: 99%

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Nanoscale thermal probing

2012

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Nanoscale novel devices have raised the demand for nanoscale thermal characterization that is critical for evaluating the device performance and durability. Achieving nanoscale spatial resolution and high accuracy in temperature measurement is very challenging due to the limitation of measurement pathways. In this review, we discuss four methodologies currently developed in nanoscale surface imaging and temperature measurement. To overcome the restriction of the conventional methods, the scanning thermal microscopy technique is widely used. From the perspective of measuring target, the optical feature size method can be applied by using either Raman or fluorescence thermometry. The near-field optical method that measures nanoscale temperature by focusing the optical field to a nano-sized region provides a non-contact and non-destructive way for nanoscale thermal probing. Although the resistance thermometry based on nano-sized thermal sensors is possible for nanoscale thermal probing, significant effort is still needed to reduce the size of the current sensors by using advanced fabrication techniques. At the same time, the development of nanoscale imaging techniques, such as fluorescence imaging, provides a great potential solution to resolve the nanoscale thermal probing problem.

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“…Using the Raman thermometry method, Yue et al (9) studied the temperature rise in a silicon substrate under near-field laser heating. In their experiment (Fig.…”

Section: Near-field Optical Temperature Measurementmentioning

confidence: 99%

mentioning

confidence: 99%

Nanoscale thermal probing

2012

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“…In thermometry, apertureless NSOM has been proposed by using an AFM tip or a nanoparticle. Temperature probing of silicon under AFM tip focused laser heating at a sub-10 nm scale was conducted via apertureless NSOM based on Raman thermometry [13]. Nanoscale thermal probing of graphene on 4H-SiC in the thickness direction was reported using Raman spectrometer with a resolution down to 1 nm [14].…”

Section: Introductionmentioning

confidence: 99%

Nanoscale Probing of Thermal, Stress, and Optical Fields under Near-Field Laser Heating

Tang

Wang

2013

PLoS ONE

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Micro/nanoparticle induced near-field laser ultra-focusing and heating has been widely used in laser-assisted nanopatterning and nanolithography to pattern nanoscale features on a large-area substrate. Knowledge of the temperature and stress in the nanoscale near-field heating region is critical for process control and optimization. At present, probing of the nanoscale temperature, stress, and optical fields remains a great challenge since the heating area is very small (∼100 nm or less) and not immediately accessible for sensing. In this work, we report the first experimental study on nanoscale mapping of particle-induced thermal, stress, and optical fields by using a single laser for both near-field excitation and Raman probing. The mapping results based on Raman intensity variation, wavenumber shift, and linewidth broadening all give consistent conjugated thermal, stress, and near-field focusing effects at a 20 nm resolution (<λ/26, λ = 32 nm). Nanoscale mapping of near-field effects of particles from 1210 down to 160 nm demonstrates the strong capacity of such a technique. By developing a new strategy for physical analysis, we have de-conjugated the effects of temperature, stress, and near-field focusing from the Raman mapping. The temperature rise and stress in the nanoscale heating region is evaluated at different energy levels. High-fidelity electromagnetic and temperature field simulation is conducted to accurately interpret the experimental results.

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“…Another kind of near-field laser focusing is that induced by atomic force microscopy (AFM) tips. Nanoscale temperature probing of silicon under AFM tip focused laser heating has been conducted using Raman thermometry [7].…”

Section: Introductionmentioning

confidence: 99%

Thermal probing in single microparticle and microfiber induced near-field laser focusing

Tang

Wang

2013

Opt. Express

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Microparticle and microfiber induced near-field laser heating has been widely used in surface nanostructuring. Information about the temperature and stress fields in the nanoscale near-field heating region is imperative for process control and optimization. Probing of this nanoscale temperature, stress, and optical fields remains a great challenge since the heating area is very small (~100 nm or less) and not immediately accessible for sensing. In this work, thermal probing of a single microparticle and microfiber induced near-field focusing on a substrate with laser light is conducted experimentally and interpreted by high-fidelity simulations. The laser (λ = 532 nm) serves as both heating and Raman probing sources. It is very interesting to note that variation of the Raman intensity, wavenumber, and linewidth all can be used to precisely capture the size of the micro-size subject on the substrate. Nanoscale mapping of conjugated optical, thermal, and stress effects, and the de-conjugation of these effects are performed. The effect of the laser fluence on the temperature and stress in the nanoscale heating region is investigated. With laser fluence of 3.9 ×10(9) W/m(2) and for a 1.21 μm silica particle induced laser heating, the maximum temperature rise and local stress are 58.5 K and 160 MPa, respectively. For a 6.24 μm glass fiber, they are 33.0 K and 120 MPa, respectively. Experimental results are explained and consistent with three-dimensional high-fidelity optical, thermal and stress field simulation.

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Noncontact Sub-10 nm Temperature Measurement in Near-Field Laser Heating

Cited by 44 publications

References 33 publications

Nanoscale thermal probing

Nanoscale thermal probing

Nanoscale Probing of Thermal, Stress, and Optical Fields under Near-Field Laser Heating

Thermal probing in single microparticle and microfiber induced near-field laser focusing

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