Noncontact Measurement of Complex Permittivity and Thickness by Using Planar Resonators

Yang, Chin‐Ping; Lee, Chieh-Sen; Chen, Kuan-Wei; Chen, Kuan-Zhou

doi:10.1109/tmtt.2015.2503764

Cited by 191 publications

(89 citation statements)

References 20 publications

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“…In the former, the resonator is mainly composed of waveguides but usually suffer in large size and cumbersome experimental preparation process. In the later, the resonant techniques based on the planar microstrip line are preferable because of their low cost, lightweight, and ease in fabrication, and it has been the subject of an intensive research activity in the last years …”

Section: Introductionmentioning

confidence: 99%

“…For microwave sensors loaded with planar resonators, the sensing part of a microwave material characterization system can be constructed using either a single resonator, such as split‐ring resonator (SRR) . complimentary SRR (CSRR), or interdigital capacitor (IDC) . These aforementioned structures are commonly used in sensor designing due to their smaller dimension and higher sensitivity compared with the traditional measurement methods.…”

Section: Introductionmentioning

confidence: 99%

“…In the later, the resonant techniques based on the planar microstrip line are preferable because of their low cost, lightweight, and ease in fabrication, and it has been the subject of an intensive research activity in the last years. [17][18][19][20][21][22][23][24][25][26][27][28][29] For microwave sensors loaded with planar resonators, the sensing part of a microwave material characterization system can be constructed using either a single resonator, such as split-ring resonator (SRR). [18][19][20][21] complimentary SRR (CSRR), [22][23][24][25] or interdigital capacitor (IDC).…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Improved approach using symmetric microstrip sensor for accurate measurement of complex permittivity

Sun

Tang

2018

Int J RF Microw Comput Aided Eng

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A novel symmetrical planar sensor based on splitter/combiner microstrip sections with a pair of interdigital capacitors (IDCs) and 2 complementary split ring resonators (CSRRs) structure is presented. A high sensitivity area to the dielectric property of surrounding materials has been established by locating IDC unit on the top‐plane while a rectangular CSRR structure etched out on the ground plane. The symmetrical circuit makes the sensitivity further improved to the introduction of sample to be tested because of the destruction of the symmetry. The complex permittivity of the dielectric samples has been evaluated from the actual experimental scattering parameters by using back propagation neural network techniques. The proposed methodology is validated by fabricating the sensor on Rogers5880 substrate and testing various standard dielectric samples viz. PVC, Glass epoxy, FR4, and Glass in C‐band. The measured complex permittivity of the test specimens is found to be in close agreement with their values available in literature with maximum error of <5%.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Improved approach using symmetric microstrip sensor for accurate measurement of complex permittivity

Sun

Tang

2018

Int J RF Microw Comput Aided Eng

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“…Transmission lines loaded with split ring resonators (SRRs) and with other electrically small resonators [1][2][3][4][5] have been used in numerous microwave applications, including filters [6,7], enhanced bandwidth components [8], multiband components [9][10][11][12], microwave sensors [13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30] and chipless radiofrequency identification (chipless-RFID) tags [31,32], among others. Concerning chipless RFID tags, the interest in this work, transmission lines loaded with multiple resonant elements, each tuned to a different frequency, have been proposed as multi-resonant frequency domain based tags [31][32][33][34][35][36][37][38][39][40][41][42][43][44].…”

Section: Introductionmentioning

confidence: 99%

High data density and capacity in chipless radiofrequency identification (chipless-RFID) tags based on double-chains of S-shaped split ring resonators (S-SRRs)

et al. 2017

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Abstract. The data density per surface (DPS) is a figure of merit in chipless radiofrequency identification (chipless-RFID) tags. In this paper, it is demonstrated that chipless-RFID tags with high DPS can be implemented by using double-chains of S-shaped split ring resonators (S-SRRs). Tag reading is achieved by near-field coupling between the tag and the reader, a CPW transmission line fed by a harmonic signal tuned to the resonance frequency of the S-SRRs. By transversally displacing the tag over the CPW, the transmission coefficient of the line is modulated by tag motion. This effectively modulates the amplitude of the injected (carrier) signal at the output port of the line, and the identification (ID) code, determined by the presence or absence of S-SRRs at predefined and equidistant positions in the chains, is contained in the envelope function. The DPS is determined by S-SRR dimensions and by the distance between S-SRRs in the chains. However, by using two chains of S-SRRs, the number of bits per unit length that can be accommodated is very high. This chipless-RFID system is of special interest in applications where the reading distance can be sacrificed in favor of data capacity (e.g., security and authentication). Encoding of corporate documents, ballots, exams, etc., by directly printing the proposed tags on the item product to prevent counterfeiting is envisaged.

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“…INTRODUCTION ON-DESTRUCTIVE measurement of dielectric and polymer structures with varying layer thicknesses and relative permittivity offer valuable information when characterizing these structures in a multitude of fabrication processes and quality control applications, such as on-wafer thin-film coating thickness, microfabrication of microelectromechanical systems ( MEMS) , biomedical applications such as joint replacements protective coatings, and material science for purposes of material characterization [1]- [6], [19]. There are multiple techniques for thickness characterization of single and multilayer structures, the most popular of which are white-light interferometry and surface profile scanning.…”

mentioning

confidence: 99%

Non-Invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films

et al. 2018

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-This work presents a low-cost non-invasive millimeter-wave surface-height measurement sensor of dielectric and polymer films on glass and quartz substrates. The surfaceheight profiler utilizes near-field resonance measurement technique operating at 96 GHz implemented by using a single complementary split-ring resonator (CSRR) integrated with a tailor-made WR10 rectangular waveguide. By placing a glass or quartz substrate uniformly coated with SU-8 photoresist on top of the CSRR, the thickness of the SU-8 polymer can be extracted based on the reflected and transmitted electromagnetic-wave energy interacting at the electrical boundary between the substrate and polymer film. Uniform single layers of SU-8 polymer with thicknesses from 3 to 13 m, coated on top of glass substrate are measured and characterized. The extracted polymer-film thicknesses from the sensor in this work show an agreement of higher than 95% as compared to the commercial surface profiler instrument, while offering various advantages e.g. non-invasion, ease of measurement setup, low-cost and miniaturization.Index Terms-non-invasive measurement, millimeter-wave sensor, thickness characterization, SU-8 photoresist, W-band.

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Noncontact Measurement of Complex Permittivity and Thickness by Using Planar Resonators

Cited by 191 publications

References 20 publications

Improved approach using symmetric microstrip sensor for accurate measurement of complex permittivity

Improved approach using symmetric microstrip sensor for accurate measurement of complex permittivity

High data density and capacity in chipless radiofrequency identification (chipless-RFID) tags based on double-chains of S-shaped split ring resonators (S-SRRs)

Non-Invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films

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