On the basis of the quantum theory of diffusion the influence of crystal lattice excitations (ultrasonic, nuclear irradiation) on the diffusion of impurity atoms is analysed. The effects considered in the paper are determined by two factors: the change of population of the impurity oscillator levels due to interaction with nonequilibrium excitations of the crystal lattice, and the change of the probability of diffusion transitions on the given level. The effects are qualitatively different for heavy impurity atoms whose diffusion is enhanced in nonequilibrium conditions and for light impurity atoms for which the effect of additional localization is possible. Ha OCHOBC KBaHTOBOfi ,4M@$Y3HH IIpOBeAeH aHaJIA3 BJIHRHHX B o 3 6 y~~e H~f i KpHCTaJIJIHYeCKOfi PeIIICTKA (yJIhTpa3ByK, XAepHOe 0 6 n y s e~~e ) Ha ,4A@$Y3HK) IIpHMKHhIX BTOMOB. PaCcMOTpeHHbIe B pa6OTe 3@$eKTbl OIIpeAeJIXIoTCX AByMR @KTOpaMA: A3MeHeHHeM 3aceJIeHHOCTefi YpOBHefi npMMeCHOr0 OCqHJIJIRTOpa, 6naronap~ B3aHMOnefiCTBHW C HePaBHOBeCHhlMA KOJIe6aHHRMA KpHCTaJIJIAYecKOfi PeIIIeTKH, H A3MeHeHHeM BepOXTHOCTA nH@$y3AOHHOrO IIepeXOna IIO AaHHOMY YPOBHIO. 3@@KTbI