Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply

Schmidtová, Tereza; Souček, Pavel; Kudrle, Vít; Vašina, Petr

doi:10.1016/j.surfcoat.2013.05.014

Cited by 20 publications

(18 citation statements)

References 38 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It involves hydrocarbon gas decomposition, strong carbon deposition, and modified hysteresis behavior. Therefore, it is called hybrid PECVD-PVD process [13]. The power to the magnetrons may be supplied either in direct current (direct current magnetron sputtering -DCMS) [5,10], radio frequency sputtering [14] or pulsed (modified pulse power -MPP, or high-power impulse magnetron sputtering -HiPIMS) modes.…”

Section: Introductionmentioning

confidence: 99%

Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques

et al. 2019

View full text Add to dashboard Cite

The evolution of structure, mechanical properties and friction behavior of DC magnetron sputtered (DCMS), high power impulse magnetron sputtered (HiPIMS) and high target utilization sputtered (HiTUS) W-C:H coatings was investigated as a function of the addition of acetylene and hydrogen into Ar atmosphere. The gradual addition of reactive gases caused a transition from PVD toward hybrid PVD-PECVD and even PECVD dominant processes. The coating structure evolved from nanocrystalline toward nanocomposite and amorphous structure with the increase of acetylene addition. Deposition rates in all techniques increased linearly with the increase of acetylene flow until certain saturation limit due to the limited energy available for acetylene fragmentation during hybrid PVD-PECVD deposition. Hardness and coefficient of friction in DCMS and HiTUS W-C:H coatings deposited in this regime followed standard congruent tendencies whereas PECVD dominated deposition process produced coatings with different dependencies. In contrary, HiPIMS W-C:H coatings showed low sensitivity to the influence of acetylene and hydrogen additions. Lower coefficients of friction (<0.1) and moderate hardness (around 20 GPa) of HiPIMS W-C:H coatings over a wide range of acetylene additions seem to be a principal advantage of HiPIMS compared to DCMS and HiTUS techniques in this class of coatings. Keywords: W-C:H coatings, DC magnetron sputtering (DCMS), high power impulse magnetron sputtering (HiPIMS), high target utilization sputtering (HiTUS), hardness, coefficient of friction.

show abstract

Section: Introductionmentioning

confidence: 99%

Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques

et al. 2019

View full text Add to dashboard Cite

show abstract

“…The dependence of the deposition plasma parameters on the acetylene supply was studied for the planar magnetron setup in a laboratory by Schmidtová et al [14], where a non-monotonous dependence of the cathode voltage, the discharge current, the total pressure and selected spectral line intensities on the acetylene supply was reported. The changes of the plasma parameters were related to changes of the target surface state.…”

Section: Accepted Manuscriptmentioning

confidence: 99%

“…Hydrogenated (nc-TiC/a-C:H) coatings are usually prepared by utilizing a hybrid physical vapor deposition -plasma enhanced chemical vapor deposition (PVD-PECVD) process consisting of the magnetron sputtering of a titanium target (PVD) in an atmosphere containing acetylene [3,[12][13][14][15][16][17][18] or methane [19,20] which acts as the source of carbon (PECVD).…”

Section: Introductionmentioning

confidence: 99%

Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions

Žemlička

Jílek²,

Vogl³

et al. 2016

Surface and Coatings Technology

View full text Add to dashboard Cite

“…The CVD method of coatings on the cutting tools is widely applied for improving the cutting performance [7]. Hybrid PVD-PECVD process of titanium sputtering process is used to prepare metal-carbon nanocomposites [8]. In the PVD method of TiAlN coated cutting tools, it is seen that they have less wear resistance than uncoated cutting tools [9].…”

Section: Introductionmentioning

confidence: 99%

Experimental and theoretical analysis of tool life between plasma enhanced CVD and PVD multilayer nanocoated cutting tools

Calaph¹,

Subramanian²,

Stalin

et al. 2020

Mater. Res. Express

View full text Add to dashboard Cite

Tool life of the traditional cutting tools is comparatively lesser on machining the martensitic stainless steel AISI 416 which is one of the hardest materials. In order to increase the tool life, wear-resistant nanocoatings on the cutting tools have been explored. This study enunciates a comparison of tool life between PECVD (plasma-enhanced CVD multilayer nanocoated) and PVDMNC (PVD multilayer nanocoated) cutting tools on turning a martensitic stainless steel AISI 416 by experimental and theoretical investigations in addition to exploration of the machinability studies of cutting tool flank wear, tool hardness and surface roughness of work material. An orthogonal design, signal-to-noise ratio and Analysis of Variance (ANOVA) methods were employed to confirm the parameters like cutting speed, tool hardness and feed rate that are involved in the study to estimate the cutting toollife. The investigations confirmed that cutting speed was the most dominant factor in determining tool life while comparing with other parameters. It was observed from the ANOVA results that the cutting speed, tool hardness, and feed rate have contributed 41.44%, 33.79%, and 24.35% respectively in determining the tool life of PECVD cutting tools whereas the contributions of the same parameters were found to be 40.01%, 32.90%, and 26.63% respectively for PVDMNC cutting tool. It is evident from the results that the cutting performance of the PECVD cutting tool is superior in terms of cutting speed and hardness which were enhanced by 1.43% and 0.89% respectively in addition to lesser wear rate when compared to the performance of PVDMNC cutting tools. Nomenclature ANOVAAnalysis of variance F Feed rate (mm/min) CVD Chemical Vapor Deposition Process V Cutting speed (m/min) PVD Physical Vapor Deposition Process S/N ratio Signal-to-noise ratio PE Plasma Enhanced MS Means of squares DOC Depth of cut DF Degree of freedom F va The value of variance T Tool life HV Hardness value by Vickers

show abstract

Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply

Cited by 20 publications

References 38 publications

Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques

Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques

Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions

Experimental and theoretical analysis of tool life between plasma enhanced CVD and PVD multilayer nanocoated cutting tools

Contact Info

Product

Resources

About