Non-Imaging Digital CMOS-SOI-MEMS Uncooled Passive Infra-Red Sensing Systems

Blank, Tanya; Brouk, Igor; Bar-Lev, Sharon; Amar, Gavriel; Meimoun, Elie; Bouscher, Shlomi; Meltsin, Maxim; Vaiana, Michele; Maierna, A.; Castagna, Maria Eloisa; Bruno, Giuseppe; Nemirovsky, Y.

doi:10.1109/jsen.2020.3022095

Cited by 17 publications

(13 citation statements)

References 16 publications

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“…Each TMOS package, illustrated in the photographs of Figure 14 , contains two TMOS devices, one “active”, exposed to the thermal radiation from the surroundings, and one “blind”, which “sees” only itself as it is shielded from the incoming radiation by an aluminum mirror deposited on the package [ 24 , 64 ]. The two devices are employed in a differential configuration [ 26 , 29 ]: in this way the blind TMOS acts as reference, canceling out the common mode signal and self-heating effects.…”

Section: State-of-the-art Reviewmentioning

confidence: 99%

“…Employing the TMOS as a 3-terminal device or in a 2-terminal (diode-like) configuration, TCC and TCV values that well compare with the TCR of bolometers are obtained [ 64 ], in particular TCC values above 4%/K are achieved with the TMOS operating in subthreshold region [ 23 ]. While the TCR of bolometers suffers from large manufacturing non-uniformity, this is not the case for the TMOS.…”

Section: State-of-the-art Reviewmentioning

confidence: 99%

“…TMOS sensors have already been employed for intruder detection applications [ 64 , 65 ], therefore they can be used for motion and presence detection for appliances automation and occupancy detection. Furthermore, thanks to its high responsivity and sensitivity, the TMOS is very suitable for human body contactless temperature measurements.…”

Section: State-of-the-art Reviewmentioning

confidence: 99%

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Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

2021

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The worldwide spread of COVID-19 has forced us to adapt to a new way of life made of social distancing, avoidance of physical contact and temperature checks before entering public places, in order to successfully limit the virus circulation. The role of technology has been fundamental in order to support the required changes to our lives: thermal sensors, in particular, are especially suited to address the needs arisen during the pandemic. They are, in fact, very versatile devices which allow performing contactless human body temperature measurements, presence detection and people counting, and automation of appliances and systems, thus avoiding the need to touch them. This paper reviews the theory behind thermal detectors, considering the different types of sensors proposed during the last ten years, while focusing on their possible employment for COVID-19 related applications.

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Section: State-of-the-art Reviewmentioning

confidence: 99%

Section: State-of-the-art Reviewmentioning

confidence: 99%

Section: State-of-the-art Reviewmentioning

confidence: 99%

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Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

2021

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“…It is named GMOS, it was presented in [3][4][5] and shown in Figure 1. GMOS is based on a thermal sensor (named TMOS) that was invented by our group, and has been studied over the past decade [6][7][8][9][10][11]. The TMOS sensing element is a suspended micromachined MOSFET transistor operating in the subthreshold, which was fabricated in CMOS-SOI technology and released with the MEMS backend process.…”

Section: Introductionmentioning

confidence: 99%

Reducing Food Waste with a Tiny CMOS-MEMS Gas Sensor, Dubbed GMOS

Shlenkevitch

Stolyarova

Blank

et al. 2020

7th International Electronic Conference on Sensors and Applications

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We present a tiny combustion-type gas sensor (named GMOS) fabricated using standard CMOS-SOI-MEMS technology. It is a low-cost thermal sensor with an embedded heater, catalytic layer and suspended transistor as a sensing element. The sensor principle relies on the combustion reaction of the gas that takes place on the catalytic layer. The exothermic combustion leads to a sensor temperature increase, which modifies the transistor current-voltage characteristics. The GMOS is useful for detecting different gases, such as ethanol, acetone and especially ethylene, as well as their mixtures. The sensor demonstrates an excellent sensitivity to ethylene of 40 mV/ppm and selective ethylene detection using nanoparticle catalytic layers of Pt, as well as TiO2. Along with its low energy consumption, GMOS is a promising technology for low-cost ethylene detection systems at different stages in the food supply chain, and it may help reduce global fruit and vegetable loss and waste.

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“…Commercial technologies currently in use for uncooled infrared devices are bolometers, thermopiles, and pyroelectric sensors. More recently, a new generation of uncooled thermal sensors based on CMOS-SOI-MEMS technology has emerged, dubbed "TMOS" [1].…”

Section: Introductionmentioning

confidence: 99%

Wafer-Level Packaged CMOS-SOI-MEMS Thermal Sensor at Wide Pressure Range for IoT Applications

Avraham

Golan

Vaiana

et al. 2020

7th International Electronic Conference on Sensors and Applications

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Wafer-level processed and wafer-level packaged low-cost microelectromechanical system (MEMS) thermal sensors are required for a wide range of Internet of Things (IoT) and wearables applications. Recently, a new generation of uncooled thermal sensors based on CMOS-SOI-MEMS technology has emerged, with higher performance compared to commercial thermal sensors (bolometers, thermopiles, and pyroelectric sensors). The technology is implemented in commercial CMOS FABs and is, therefore, based on mature technology and implemented at a low cost. When packaged in a high vacuum, the sensors are dubbed TMOS and are applied for uncooled IR radiation. At atmospheric pressure, the sensors may function as gas sensors, dubbed GMOS. This paper focuses on the study of the thermal performance of wafer-level processed and packaged TMOS and GMOS sensors, where the pressure varies between high vacuum (0.01 Pa) and atmospheric pressure. The present study is based on analytical thermal modeling for gaining physical insight, 3D simulation is performed by ANSYS software, and finally, the measurements of the packaged devices are compared with the modeling and simulations.

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Non-Imaging Digital CMOS-SOI-MEMS Uncooled Passive Infra-Red Sensing Systems

Cited by 17 publications

References 16 publications

Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

Reducing Food Waste with a Tiny CMOS-MEMS Gas Sensor, Dubbed GMOS

Wafer-Level Packaged CMOS-SOI-MEMS Thermal Sensor at Wide Pressure Range for IoT Applications

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