Non-disruptive Bessel-beam array generation for high-throughput shadow mask laser patterning

Abstract

Generation of multiple parallel non-diffractive beams without any disruption of each beam is a challenging task. Here, we report the approach of spatial-spectral modulation for non-disruptive generation of Bessel beam array. Such modulation is realized with a simple beam splitter placed in a Fourier plane of the initial beam. The various designs of the beam-splitter phase mask allow to generate an array of the Bessel beams with various shapes and controlled intensity distribution without mutual interference of each beam. As such, this array formation can enhance quality of glass cutting and increase the throughput of micro-patterning of glass-fine mask required for a new generation high-resolution OLED display.