Direct laser patterning of glass mask for micro display using GHz bursts
Woohyun Jung,
Hyungsik Kim,
Konstantin Mishchik
et al.
Abstract:Development of high‐precision RGB patterning process is needed to implement high‐resolution micro display (OLEDoS) for next‐generation VR/AR products. In general, specially designed and manufactured masks are required to realize above 3000‐ppi high‐resolution display in structured OLED material deposition. In this study, we developed direct laser patterning IR‐fs optical system operating in MHz and GHz burst modes and evaluated its capability for precise micro‐drilling of aluminoborosilicate glass materials. T… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.