2017
DOI: 10.1557/mrs.2017.185
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Noble gas ion beams in materials science for future applications and devices

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Cited by 25 publications
(22 citation statements)
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References 39 publications
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“…HIM‐SIMS was a relatively new technique that combined the high‐resolution imaging of the HIM with the chemical sensitivity of SIMS. [ 114,115 ] The HIM is a gas field ion source based focused ion beam capable of operating with helium and neon gas, and offering beam spot sizes of 0.5 and 2 nm, respectively. The SIMS add‐on unit allows detection of the ion distribution with a spatial resolution of ≈15 nm.…”
Section: Methodsmentioning
confidence: 99%
“…HIM‐SIMS was a relatively new technique that combined the high‐resolution imaging of the HIM with the chemical sensitivity of SIMS. [ 114,115 ] The HIM is a gas field ion source based focused ion beam capable of operating with helium and neon gas, and offering beam spot sizes of 0.5 and 2 nm, respectively. The SIMS add‐on unit allows detection of the ion distribution with a spatial resolution of ≈15 nm.…”
Section: Methodsmentioning
confidence: 99%
“…A helium ion microscope (Zeiss Orion Nanofab) was utilized for the secondary electron imaging of specimens. Helium ion microscopy (HIM), enabled by a gas field ion source (GFIS), is a powerful imaging and nanofabrication technique compatible with many applications in materials science [30][31][32] . HIM offers small interaction volume of He and Ne (the two gases offered), small beam spot size, and a moderate sputtering rate 33,34 .…”
Section: Helium Ion Microscopy (Him)mentioning
confidence: 99%
“…In their article, Zhao et al 84 report on e-beaminduced modifications in the atomic structure of two-dimensional materials such as graphene and layered chalcogenides, including creation of single vacancies and defect clusters, beam-induced phase transitions, and single-atom motion. In their article, Belianinov et al 85 report on ion-beam-based matter fabrication, advances enabled by rapidly emerging He and other ion microscopies. Finally, Jiang et al 86 report on the applications of electron beams in inducing local structural changes in 3D solids, including amorphization-crystallization and phase transitions.…”
Section: In This Issuementioning
confidence: 99%