NO gas sensor based on ZnGa2O4 epilayer grown by metalorganic chemical vapor deposition

Abstract

A gas sensor based on a ZnGa 2 O 4 (ZGO) thin film grown by metalorganic chemical vapor deposition operated under the different temperature from 25 °C to 300 °C is investigated in this study. This sensor shows great sensing properties at 300 °C. The sensitivity of this sensor is 22.21 as exposed to 6.25 ppm of NO and its response time is 57 s. Besides that, the sensitivities are 1.18, 1.27, 1.06, and 1.00 when exposed to NO 2 (500 ppb), SO 2 (125 ppm), CO (125 ppm), and CO 2 (1500 ppm), respectively. These results imply that the ZGO gas sensor not only has high sensitivity, but also has great selectivity for NO gas. Moreover, the obtained results suggest that ZGO sensors are suitable for the internet of things(IOT) applications.

Structural Characteristics and Photoluminescence Properties of Sputter-Deposition ZnGa2O4 Thin Films on Sapphire and Si(100) Substrates

“…In fact, thin film structures are more stable and reliable than one-dimensional nanostructures and better adhere to solid surfaces in practical devices. Wu et al discussed the gas sensor properties based on epitaxial ZnGa 2 O 4 thin film grown on sapphire substrate by MOCVD [13]. Tsai et al reported that the successful manufacture of deep-UV ZnGa 2 O 4 photodetectors and investigate the effect of annealing temperature on the devices electrical properties [14].…”

Organic-Inorganic Hybrid Materials for Room Temperature Light-Activated Sub-ppm NO Detection

“…Sensor measurements demonstrate that hybrid materials are able to detect NO at room temperature in the concentration range of 0.25-4.0 ppm with the detection limit of 69-88 ppb.Nanomaterials 2020, 10, 70 2 of 22 in noninvasive diagnosis of respiratory diseases [7][8][9]. In this case, the limitation of the quantitative determination of NO in exhaled air is due to the low level of its concentration (20-200 ppb) among a wide range of interfering gases [10].Direct determination of nitrogen monoxide in the gas phase is possible using conductometric gas sensors based on various semiconductor metal oxides [7,[10][11][12][13][14][15][16][17][18][19][20][21][22]. To increase selectivity of such analysis along with lower power consumption, complete or partial replacement of thermal heating with photoactivation is a promising approach.…”

“…Direct determination of nitrogen monoxide in the gas phase is possible using conductometric gas sensors based on various semiconductor metal oxides [7,[10][11][12][13][14][15][16][17][18][19][20][21][22]. To increase selectivity of such analysis along with lower power consumption, complete or partial replacement of thermal heating with photoactivation is a promising approach.…”

Spinel-Type Materials Used for Gas Sensing: A Review

“…Wu et al [ 27 ] synthesized ZnGa 2 O 4 nanosheets which were able to detect NO, by using metal organic vapor deposition (MOCVD). Through SEM observation, it could be found that a layer of nanosheets was formed by the arrangement of spindle-shaped particles.…”