2010
DOI: 10.1088/0022-3727/43/42/425301
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Nitrogen incorporation into GaAs lattice as a result of the surface cavitation effect

Abstract: Semi-insulating gallium arsenide was exposed to cavitation impact initiated by focusing a high-frequency acoustic wave into liquid nitrogen. Optical and atomic force microscopy methods were used for the analysis of surface morphology. Formation of microstructures as well as change in the chemical composition of the surface are observed. The morphology of the structures is highly dependent on the acoustic parameters. Raman spectroscopy data have confirmed the incorporation of nitrogen atoms into the GaAs lattic… Show more

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Cited by 11 publications
(8 citation statements)
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“…For cavitation activation, we used a high-frequency system (MHz) with focused energy resonator described elsewhere [ 6 ]. The experimental setup consisted of a reactor vessel and US equipment.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…For cavitation activation, we used a high-frequency system (MHz) with focused energy resonator described elsewhere [ 6 ]. The experimental setup consisted of a reactor vessel and US equipment.…”
Section: Methodsmentioning
confidence: 99%
“…In our previous work, the suitable condition of the cavitation processing for causing the incorporation of the nitrogen atoms into the GaAs lattice and the formation of an ordered system of (GaN)m(GaAs)n clusters ( m = n = 1) have been successfully established [ 6 , 7 ]. It was also revealed that the characteristic dimension of the peculiarities on the semiconductor surface depended on the exposure parameters and can be controlled (from micron- to nanoscale dimension) by the regulation of the acoustic frequency.…”
Section: Introductionmentioning
confidence: 99%
“…In accordance with the method described in [22], the structures were treated in a cavitating cryogenic liquid in order to test the cohesive properties of the deposited diamond like carbon films. It was found that the coating remains stable against such a treat ment for 10-15 min.…”
Section: Adhesion and Cohesionmentioning
confidence: 99%
“…In the previous work, the suitable cavitation conditions to cause modification of the gallium arsenide surface up to the microscale pattern formation as well as in a change in the chemical composition of semiconductor have been successfully established [12,13]. In this investigation, we use cavitations' impact to introducing mechanical stresses on silicon for its properties engineering.…”
mentioning
confidence: 99%
“…For cavitation activation, a high frequency system (1 ÷ 6 MHz) with focused energy resonator described elsewhere [12] was used. Semiconductor target was placed inside the acoustically driven copper cell filled with technical liquid nitrogen, where the megasonic processing was initiated.…”
mentioning
confidence: 99%