Various mesoporous silicas , SBA-15(SBA15), MCM-48(M48)] and silica gel were nitrided with ammonia in a plug-flow reactor at 1273 K. The nitrogen contents of various (oxy)nitrides obtained were increased with the amount of ammonia supplied per sample weight. The nitridation rates of silica samples were not changed with the pore sizes of the samples but with the pore structures. They were dependent on the surface areas of the parent silicas. The maximum contents of nitrogen in nitrided M41s, SBA15, M48, and silica gel were ca. 38, 35, 39, and 21 wt.-%, respectively, which indicates the great difference between the reactivity of the mesoporous silicas and silica gel.29 Si NMR and X-ray photoelectron spectroscopy also supported the progress in almost complete nitridation of the former samples.