2007
DOI: 10.1016/j.mee.2007.04.078
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Nickel nanoparticle deposition at room temperature for memory applications

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Cited by 34 publications
(18 citation statements)
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“…1 Compared to semi-conductive (Si,Ge) 2,3 and organic (C, graphene) 4,5 charge storage candidates, noble metal nanoparticles (Pt, 6 Au 7 and Ag 8 ) embedded in oxide dielectric films (Al 2 O 3 , HfO x , ZrO 2 , TiO 2 , HfAlO x ) have been highlighted due to their high work function and excellent charge properties, but they are not suitable for large-scale industrial applications due to their high cost. Ni nanocrystals (Ni-NCs) has a high work function of 5.35 eV, 9 stable chemical properties, and have been reported to exhibit a memory window width (flat-band voltage shift |∆ V FB |) ranging from 1 to 20 V, [10][11][12][13][14][15][16] showing excellent charge storage capacity. However, due to the oxidization of Ni-NCs in oxide matrix and diversify of nickel oxides, the endurance and retention properties for Ni-NCs-based memory cell need to be further improved.…”
Section: Introductionmentioning
confidence: 99%
“…1 Compared to semi-conductive (Si,Ge) 2,3 and organic (C, graphene) 4,5 charge storage candidates, noble metal nanoparticles (Pt, 6 Au 7 and Ag 8 ) embedded in oxide dielectric films (Al 2 O 3 , HfO x , ZrO 2 , TiO 2 , HfAlO x ) have been highlighted due to their high work function and excellent charge properties, but they are not suitable for large-scale industrial applications due to their high cost. Ni nanocrystals (Ni-NCs) has a high work function of 5.35 eV, 9 stable chemical properties, and have been reported to exhibit a memory window width (flat-band voltage shift |∆ V FB |) ranging from 1 to 20 V, [10][11][12][13][14][15][16] showing excellent charge storage capacity. However, due to the oxidization of Ni-NCs in oxide matrix and diversify of nickel oxides, the endurance and retention properties for Ni-NCs-based memory cell need to be further improved.…”
Section: Introductionmentioning
confidence: 99%
“…9, 10, 11 Nickel thin films have attracted attention due to their catalytic activity and electrical properties. 12,13 …”
Section: Introductionmentioning
confidence: 99%
“…Most of the work carried out on magnetic materials has been done on Fe, Co and their alloys due to their strong magnetism. However, the only works found about Ni nanoparticles fabricated with a sputtering source are dedicated to the study of magnetic properties of nanoparticles below 15 nm and their applications [10,11]. Ni is a little weaker magnetic material but exhibits singular properties.…”
Section: Introductionmentioning
confidence: 99%
“…It exhibits a spin-glass behaviour at low temperatures [13]. Ni nanoparticles embedded in an insulating film have been applied to non-volatile memory developments [11]. All these magnetic properties and applications require a good control on particle size and structure.…”
Section: Introductionmentioning
confidence: 99%